scholarly journals A Study on Capacitive Micromachined Ultrasonic Transducer Periodic Sparse Array

Micromachines ◽  
2021 ◽  
Vol 12 (6) ◽  
pp. 684
Author(s):  
Tian Zhang ◽  
Wendong Zhang ◽  
Xingling Shao ◽  
Yuhua Yang ◽  
Zhihao Wang ◽  
...  
Keyword(s):  
Ultrasonic Transducer ◽  
Three Dimensional ◽  
Hardware Complexity ◽  
Sparse Array ◽  
Array Configuration ◽  
Effective Aperture ◽  
Capacitive Micromachined Ultrasonic Transducer ◽  
Active Channels ◽  
Beam Patterns ◽  
Receive Array

Capacitive micromachined ultrasonic transducer (CMUT) is an ultrasonic transducer based on the microelectromechanical system (MEMS). CMUT elements are easily made into a high-density array, which will increase the hardware complexity. In order to reduce the number of active channels, this paper studies the grating lobes generated by CMUT periodic sparse array (PSA) pairs. Through the design of active element positions in the transmitting and receiving processes, the simulation results of effective aperture and beam patterns show that the common grating lobes (CGLs) generated by the transmit and receive array are eliminated. On the basis of point targets imaging, a CMUT linear array with 256 elements is used to carry out the PSA pairs experiment. Under the same sparse factor (SF), the optimal sparse array configuration can be selected to reduce the imaging artifacts. This conclusion is of great significance for the application of CMUT in three-dimensional ultrasound imaging.

Research on optimization sparse method for capacitive micromachined ultrasonic transducer array: heuristic algorithm

Sensor Review ◽  
2021 ◽  
Vol ahead-of-print (ahead-of-print) ◽  
Author(s):  
Tian Zhang ◽  
Wendong Zhang ◽  
XingLing Shao ◽  
Yang Wu
Keyword(s):  
Large Scale ◽  
Linear Array ◽  
Ultrasonic Transducer ◽  
Side Lobe ◽  
Hardware Complexity ◽  
Content Type ◽  
Sparse Array ◽  
Imaging Results ◽  
Capacitive Micromachined Ultrasonic Transducer ◽  
Imaging Artifacts

Purpose Because of the small size and high integration of capacitive micromachined ultrasonic transducer (CMUT) component, it can be made into large-scale array, but this lead to high hardware complexity, so the purpose of this paper is to use less elements to achieve better imaging results. In this research, an optimized sparse array is studied, which can suppress the side lobe and reduce the imaging artifacts compared with the equispaced sparse array with the same number of elements. Design/methodology/approach Genetic algorithm is used to sparse the CMUT linear array, and Kaiser window apodization is added to reduce imaging artifacts, the beam pattern and peak-to-side lobe ratio are calculated, point targets imaging comparisons are performed. Furthermore, a 256-elements CMUT linear array is used to carry out the imaging experiment of embedded mass and forearm blood vessel, and the imaging results are compared quantitatively. Findings Through the imaging comparison of embedded mass and forearm blood vessel, the feasibility of optimized sparse array of CMUT is verified, and the purpose of reducing the hardware complexity is achieved. Originality/value This research provides a basis for the large-scale CMUT array to reduce the hardware complexity and the amount of calculation. At present, the CMUT array has been used in medical ultrasound imaging and has huge market potential.

scholarly journals High-Frame-Rate 3-D Vector Flow Imaging in the Frequency Domain

2020 ◽  
Vol 10 (15) ◽  
pp. 5365 ◽  
Author(s):  
Stefano Rossi ◽  
Alessandro Ramalli ◽  
Fabian Fool ◽  
Piero Tortoli
Keyword(s):  
Frequency Domain ◽  
Signal To Noise Ratio ◽  
Ultrasonic Transducer ◽  
Computational Cost ◽  
Three Dimensional ◽  
Frame Rate ◽  
Velocity Measurements ◽  
High Frame Rate ◽  
Capacitive Micromachined Ultrasonic Transducer ◽  
Spiral Array

Ultrasound vector Doppler techniques for three-dimensional (3-D) blood velocity measurements are currently limited by low temporal resolution and high computational cost. In this paper, an efficient 3-D high-frame-rate vector Doppler method, which estimates the displacements in the frequency domain, is proposed. The novel method extends to 3-D an approach so far proposed for two-dimensional (2-D) velocity measurements by approximating the (x, y, z) displacement of a small volume through the displacements estimated for the 2-D regions parallel to the y and x directions, respectively. The new method was tested by simulation and experiments for a 3.7 MHz, 256-element, 2-D piezoelectric sparse spiral array. Simulations were also performed for an equivalent 7 MHz Capacitive Micromachined Ultrasonic Transducer spiral array. The results indicate performance (bias ± standard deviation: 6.5 ± 8.0) comparable to the performance obtained by using a linear array for 2-D velocity measurements. These results are particularly encouraging when considering that sparse arrays were used, which involve a lower signal-to-noise ratio and worse beam characteristics with respect to full 2-D arrays.

convergent-beam diffraction from surfaces

1987 ◽  
Vol 45 ◽  
pp. 30-33
Author(s):  
J. A. Eades ◽  
A. E. Smith ◽  
D. F. Lynch
Keyword(s):  
Reciprocal Lattice ◽  
Three Dimensional ◽  
Grazing Incidence ◽  
Three Dimensions ◽  
Plane Figure ◽  
Transmission Electron ◽  
Convergent Beam ◽  
Beam Patterns ◽  
Beam Diffraction

It is quite simple (in the transmission electron microscope) to obtain convergent-beam patterns from the surface of a bulk crystal. The beam is focussed onto the surface at near grazing incidence (figure 1) and if the surface is flat the appropriate pattern is obtained in the diffraction plane (figure 2). Such patterns are potentially valuable for the characterization of surfaces just as normal convergent-beam patterns are valuable for the characterization of crystals.There are, however, several important ways in which reflection diffraction from surfaces differs from the more familiar electron diffraction in transmission.GeometryIn reflection diffraction, because of the surface, it is not possible to describe the specimen as periodic in three dimensions, nor is it possible to associate diffraction with a conventional three-dimensional reciprocal lattice.

Design and Experiment of Capacitive Micromachined Ultrasonic Transducer Array for High-Frequency Underwater Imaging

2020 ◽  
Vol 13 ◽  
Author(s):  
Yuanyu Yu ◽  
Jiujiang Wang ◽  
Xin Liu ◽  
Sio Hang Pun ◽  
Weibao Qiu ◽  
...  
Keyword(s):  
Ultrasound Imaging ◽  
High Frequency ◽  
Ultrasonic Transducer ◽  
Center Frequency ◽  
Design Parameters ◽  
Underwater Imaging ◽  
Release Process ◽  
Steel Wires ◽  
Capacitive Micromachined Ultrasonic Transducer ◽  
Frequency Ultrasound

Background:: Ultrasound is widely used in the applications of underwater imaging. Capacitive micromachined ultrasonic transducer (CMUT) is a promising candidate to the traditional piezoelectric ultrasonic transducer. In underwater ultrasound imaging, better resolutions can be achieved with a higher frequency ultrasound. Therefore, a CMUT array for high-frequency ultrasound imaging is proposed in this work. Methods:: Analytical methods are used to calculate the center frequency in water and the pull-in voltage for determining the operating point of CMUT. Finite element method model was developed to finalize the design parameters. The CMUT array was fabricated with a five-mask sacrificial release process. Results:: The CMUT array owned an immersed center frequency of 2.6 MHz with a 6 dB fractional bandwidth of 123 %. The pull-in voltage of the CMUT array was 85 V. An underwater imaging experiment was carried out with the target of three steel wires. Conclusion:: In this study, we have developed CMUT for high-frequency underwater imaging. The experiment showed that the CMUT can detect the steel wires with the diameter of 100 μm and the axial resolution was 0.582 mm, which is close to one wavelength of ultrasound in 2.6 MHz.

scholarly journals An Investigation of Silica Aerogel to Reduce Acoustic Crosstalk in CMUT Arrays

Sensors ◽  
2021 ◽  
Vol 21 (4) ◽  
pp. 1459
Author(s):  
Varshitha Yashvanth ◽  
Sazzadur Chowdhury
Keyword(s):  
Silica Aerogel ◽  
Ultrasonic Transducer ◽  
Fluid Interface ◽  
Fractional Bandwidth ◽  
Neighboring Element ◽  
Element Analysis ◽  
Average Improvement ◽  
Capacitive Micromachined Ultrasonic Transducer ◽  
Scholte Wave ◽  
Fea Simulation

This paper presents a novel technique to reduce acoustic crosstalk in capacitive micromachined ultrasonic transducer (CMUT) arrays. The technique involves fabricating a thin layer of diisocyanate enhanced silica aerogel on the top surface of a CMUT array. The silica aerogel layer introduces a highly nanoporous permeable layer to reduce the intensity of the Scholte wave at the CMUT-fluid interface. 3D finite element analysis (FEA) simulation in COMSOL shows that the developed technique can provide a 31.5% improvement in crosstalk reduction for the first neighboring element in a 7.5 MHz CMUT array. The average improvement of crosstalk level over the −6 dB fractional bandwidth was 22.1%, which is approximately 5 dB lower than that without an aerogel layer. The results are in excellent agreement with published experimental results to validate the efficacy of the new technique.

scholarly journals A Review on Analytical Modeling for Collapse Mode Capacitive Micromachined Ultrasonic Transducer of the Collapse Voltage and the Static Membrane Deflections

Micromachines ◽  
2021 ◽  
Vol 12 (6) ◽  
pp. 714
Author(s):  
Jiujiang Wang ◽  
Xin Liu ◽  
Yuanyu Yu ◽  
Yao Li ◽  
Ching-Hsiang Cheng ◽  
...  
Keyword(s):  
Analytical Modeling ◽  
Ultrasonic Transducer ◽  
Governing Equations ◽  
Von Karman ◽  
Von Kármán Equations ◽  
Collapse Mode ◽  
Capacitive Micromachined Ultrasonic Transducer ◽  
Gap Height ◽  
Von Kármán ◽  
Analytical Expressions

Analytical modeling of capacitive micromachined ultrasonic transducer (CMUT) is one of the commonly used modeling methods and has the advantages of intuitive understanding of the physics of CMUTs and convergent when modeling of collapse mode CMUT. This review article summarizes analytical modeling of the collapse voltage and shows that the collapse voltage of a CMUT correlates with the effective gap height and the electrode area. There are analytical expressions for the collapse voltage. Modeling of the membrane deflections are characterized by governing equations from Timoshenko, von Kármán equations and the 2D plate equation, and solved by various methods such as Galerkin’s method and perturbation method. Analytical expressions from Timoshenko’s equation can be used for small deflections, while analytical expression from von Kármán equations can be used for both small and large deflections.

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