scholarly journals An Embedded Sensor System for Real-Time Detecting 5-DOF Error Motions of Rotary Stages

Sensors ◽  
2019 ◽  
Vol 19 (13) ◽  
pp. 2855 ◽  
Author(s):  
Zhi-Feng Lou ◽  
Xiu-Peng Hao ◽  
Yin-Di Cai ◽  
Tien-Fu Lu ◽  
Xiao-Dong Wang ◽  
...  

The geometric error motions of rotary stages greatly affect the accuracy of constructed machines such as machine tools, measuring instruments, and robots. In this paper, an embedded sensor system for real-time measurement of two radial and three angular error motions of a rotary stage is proposed, which makes use of a rotary encoder with multiple scanning heads to measure the rotational angle and two radial error motions and a miniature autocollimator to measure two tilt angular errors of the axis of rotation. The assembly errors of the grid disc of the encoder and the mirror for autocollimator are also evaluated and compensated. The developed measuring device can be fixed inside the rotary stage. In the experiments, radial error motions of two points on the axis (h = 5 mm and 60 mm) were measured and calibrated with LVDTs, and the data showed that the radial error motions of the axis were less than 20 μm, and the calibration residual errors were less than 2 μm. When intermittent external forces were applied to the stage, the change of the stage’s error motion could also be monitored accurately.

2014 ◽  
Vol 490-491 ◽  
pp. 1489-1492
Author(s):  
Meng Tao ◽  
Hong Li ◽  
Wen Kang Li ◽  
Ai Ai Huang ◽  
Zhi Cheng Xu

With the development of construction tissue engineered cornea by using biomaterials and seed cells,how to measurement transparence of tissue engineered cornea need to be solved. Purpose of the paper is bringing forward a new method to measurement transparence of tissue engineered cornea. According to the definition of corneal transparence, a beam of light is divided into equal two beams of light by spectroscope. In which a beam of light pass through cornea. Ratio of light energy flow that light passed cornea and the other one is calculated. The usual optical and measuring instruments were used, such as sensors for illumination and Data acquisition (DAQ) card. The real-time measuring device for corneal transparence is designed and implemented. The method and device are effective to real-time measurement of tissue engineered cornea transparence through the elements analysis and experiment.


Author(s):  
Dong-Hyeok Lee ◽  
Wi-Ro Lee

In this study, a real-time measurement system to easily apply multi-probe error separation method for error motion measurement of a shaft was designed and developed. An arrangement condition of sensing probes for accurate multi-probe error separation method was examined and verified by a simulation test. By following the examined arrangement condition for multi-probe method, a measurement system to measure radial and tilt error motions of a shaft was designed and developed. The efficiency of the multi-probe method with the examined arrangement condition was checked by comparing the error motion results for a rotary stage with the error motions in the specifications of the guarantee. It is expected to apply this system to a real-time monitoring system of failure diagnosis for rotating shafts in ships and plants.


2018 ◽  
Vol 414 ◽  
pp. 245-258 ◽  
Author(s):  
Jun Kyu Lee ◽  
Hong Min Seung ◽  
Chung Il Park ◽  
Joo Kyung Lee ◽  
Do Hyeong Lim ◽  
...  

2019 ◽  
Vol 157 ◽  
pp. 322-328 ◽  
Author(s):  
Nandita Keshri ◽  
Ingo Truppel ◽  
Werner B. Herppich ◽  
Martin Geyer ◽  
Cornelia Weltzien ◽  
...  

2007 ◽  
Vol 339 ◽  
pp. 314-320 ◽  
Author(s):  
D.B. Kang ◽  
S.M. Son ◽  
J.H. Ahn

A workpiece with a large surface area is likely to be uneven due to form error and waviness. These geometric disturbances can cause inaccurate micro shapes to be formed when micro features are micro-grooved into the surface and cause the resulting workpiece to fail to function as desired. Thus, the real-time monitoring and compensation is required to guarantee the form accuracy of micro features while machining the workpiece with a large surface area. In this study, a method is suggested for real-time measurement and compensation of geometric errors for the micro grooving of a large flat surface using a laser displacement sensor placed ahead of the cutting tool. Experimental results show that the compensated surface profiles fit the measured ones within an allowable tolerance even at cutting speeds as high as 200 mm/s.


Talanta ◽  
2020 ◽  
Vol 218 ◽  
pp. 121205 ◽  
Author(s):  
Chochanon Moonla ◽  
K. Yugender Goud ◽  
Hazhir Teymourian ◽  
Tanin Tangkuaram ◽  
Jerry Ingrande ◽  
...  

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