scholarly journals Boosting the local anodic oxidation of silicon through carbon nanofiber atomic force microscopy probes

2015 ◽  
Vol 6 ◽  
pp. 215-222 ◽  
Author(s):  
Gemma Rius ◽  
Matteo Lorenzoni ◽  
Soichiro Matsui ◽  
Masaki Tanemura ◽  
Francesc Perez-Murano
Keyword(s):  
Atomic Force Microscopy ◽  
Electric Field ◽  
Anodic Oxidation ◽  
Carbon Nanofiber ◽  
Great Promise ◽  
Dynamic Mode ◽  
Contact Mode ◽  
Force Microscopy ◽  
Atomic Force ◽  
Local Anodic Oxidation

Many nanofabrication methods based on scanning probe microscopy have been developed during the last decades. Local anodic oxidation (LAO) is one of such methods: Upon application of an electric field between tip and surface under ambient conditions, oxide patterning with nanometer-scale resolution can be performed with good control of dimensions and placement. LAO through the non-contact mode of atomic force microscopy (AFM) has proven to yield a better resolution and tip preservation than the contact mode and it can be effectively performed in the dynamic mode of AFM. The tip plays a crucial role for the LAO-AFM, because it regulates the minimum feature size and the electric field. For instance, the feasibility of carbon nanotube (CNT)-functionalized tips showed great promise for LAO-AFM, yet, the fabrication of CNT tips presents difficulties. Here, we explore the use of a carbon nanofiber (CNF) as the tip apex of AFM probes for the application of LAO on silicon substrates in the AFM amplitude modulation dynamic mode of operation. We show the good performance of CNF-AFM probes in terms of resolution and reproducibility, as well as demonstration that the CNF apex provides enhanced conditions in terms of field-induced, chemical process efficiency.

scholarly journals Boosting the local anodic oxidation of silicon through carbon nanofiber atomic force microscopy probes

nano Online ◽  
2016 ◽  
Author(s):  
Gemma Rius ◽  
Matteo Lorenzoni ◽  
Soichiro Matsui ◽  
Masaki Tanemura ◽  
Francesc Perez-Murano
Keyword(s):  
Atomic Force Microscopy ◽  
Anodic Oxidation ◽  
Carbon Nanofiber ◽  
Force Microscopy ◽  
Atomic Force ◽  
Local Anodic Oxidation

Conducting Polymer nanoComposites (CPC): Nanocharacterisation of layer by layer sprayed PMMA-CNT vapour sensors by Atomic force Microscopy in current Sensing Mode (CS-AFM)

2008 ◽  
Vol 1143 ◽  
Author(s):  
Bijandra Kumar ◽  
Mickaël Castro ◽  
Jianbo Lu ◽  
Jean-François Feller
Keyword(s):  
Atomic Force Microscopy ◽  
Spray Deposition ◽  
Dynamic Mode ◽  
Layer By Layer ◽  
Initial State ◽  
Contact Mode ◽  
Current Sensing ◽  
Multi Wall Carbon Nanotubes ◽  
Force Microscopy ◽  
Atomic Force

ABSTRACTOrganic vapour sensors based on poly (methylmethacrylate)-multi-wall carbon nanotubes (PMMA-CNT) conductive polymer nanocomposite (CPC) were developed via layer by layer technique by spray deposition. CPC Sensors were exposed to three different classes of solvents (chloroform, methanol and water) and their chemo-electrical properties were followed as a function of CNTcontent in dynamic mode. Detection time was found to be shorter than that necessary for full recovery of initial state. CNT real three dimensional network has been visualized by Atomic force microscopy in a field assisted intermittent contact mode. More interestingly real conductive network system and electrical ability of CPC have been explored by current-sensing atomic force microscopy (CS-AFM). Realistic effect of voltage on electrical conductivity has been found linear.

High-Resolution Imaging of Plasmid DNA in Liquids in Dynamic Mode Atomic Force Microscopy Using a Carbon Nanofiber Tip

2011 ◽  
Vol 50 (8S3) ◽  
pp. 08LB14 ◽  
Author(s):  
Masashi Kitazawa ◽  
Shuichi Ito ◽  
Akira Yagi ◽  
Nobuaki Sakai ◽  
Yoshitugu Uekusa ◽  
...  
Keyword(s):  
Atomic Force Microscopy ◽  
High Resolution ◽  
Plasmid Dna ◽  
Carbon Nanofiber ◽  
Dynamic Mode ◽  
High Resolution Imaging ◽  
Force Microscopy ◽  
Atomic Force ◽  
Resolution Imaging ◽  
Mode Atomic Force Microscopy

Role of the tip induced local anodic oxidation in the conductive atomic force microscopy of mixed phase silicon thin films

2010 ◽  
pp. NA-NA ◽  
Author(s):  
Aliaksei Vetushka ◽  
Antonin Fejfar ◽  
Martin Ledinský ◽  
Bohuslav Rezek ◽  
Jiří Stuchlík ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Force Microscopy ◽  
Anodic Oxidation ◽  
Mixed Phase ◽  
Conductive Atomic Force Microscopy ◽  
Force Microscopy ◽  
Silicon Thin Films ◽  
Atomic Force ◽  
Local Anodic Oxidation

Local anodic oxidation by atomic force microscopy for nano-Raman strain measurements on silicon–germanium thin films

2010 ◽  
Vol 518 (12) ◽  
pp. 3267-3272 ◽  
Author(s):  
Krzysztof Kolanek ◽  
Peter Hermann ◽  
Piotr T. Dudek ◽  
Teodor Gotszalk ◽  
Dmytro Chumakov ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Force Microscopy ◽  
Anodic Oxidation ◽  
Silicon Germanium ◽  
Strain Measurements ◽  
Force Microscopy ◽  
Atomic Force ◽  
Local Anodic Oxidation

Fabrication of 10-nm-scale nanoconstrictions in graphene using atomic force microscopy-based local anodic oxidation lithography

2015 ◽  
Vol 54 (4S) ◽  
pp. 04DJ06 ◽  
Author(s):  
Miho Arai ◽  
Satoru Masubuchi ◽  
Kenji Nose ◽  
Yoshitaka Mitsuda ◽  
Tomoki Machida
Keyword(s):  
Atomic Force Microscopy ◽  
Anodic Oxidation ◽  
Force Microscopy ◽  
Atomic Force ◽  
Local Anodic Oxidation

Investigation of the Transition from Local Anodic Oxidation to Electrical Breakdown During Nanoscale Atomic Force Microscopy Electric Lithography of Highly Oriented Pyrolytic Graphite

2016 ◽  
Vol 22 (2) ◽  
pp. 432-439 ◽  
Author(s):  
Ye Yang ◽  
Jun Lin
Keyword(s):  
Atomic Force Microscopy ◽  
Anodic Oxidation ◽  
Electrical Breakdown ◽  
Removal Rate ◽  
Pyrolytic Graphite ◽  
Sample Surface ◽  
Highly Oriented Pyrolytic Graphite ◽  
Force Microscopy ◽  
Atomic Force ◽  
Local Anodic Oxidation

AbstractAs one of the tip-based top-down nanoscale machining methods, atomic force microscopy (AFM) electric lithography is capable of directly generating flexible nanostructures on conductive or semi-conductive sample surfaces. In this work, distinct fabrication mechanisms and mechanism transition from local anodic oxidation (LAO) to electrical breakdown (BD) in the AFM nanoscale electric lithography of the highly oriented pyrolytic graphite sample surface was studied. We provide direct evidence of the transition process mechanism through the detected current–voltage (I–V) curve. Characteristics of the fabrication results under the LAO, transition, and BD regions involving the oxide growth rate or material removal rate and AFM probe wear are analyzed in detail. These factors are of great significance for improving the machining controllability and expanding its potential applications.

scholarly journals Improved atomic force microscopy cantilever performance by partial reflective coating

2015 ◽  
Vol 6 ◽  
pp. 1450-1456 ◽  
Author(s):  
Zeno Schumacher ◽  
Yoichi Miyahara ◽  
Laure Aeschimann ◽  
Peter Grütter
Keyword(s):  
Atomic Force Microscopy ◽  
High Vacuum ◽  
Low Frequency ◽  
Beam Deflection ◽  
High Signal ◽  
Dynamic Mode ◽  
Contact Mode ◽  
Force Microscopy ◽  
Reflective Coating ◽  
Atomic Force

Optical beam deflection systems are widely used in cantilever based atomic force microscopy (AFM). Most commercial cantilevers have a reflective metal coating on the detector side to increase the reflectivity in order to achieve a high signal on the photodiode. Although the reflective coating is usually much thinner than the cantilever, it can still significantly contribute to the damping of the cantilever, leading to a lower mechanical quality factor (Q-factor). In dynamic mode operation in high vacuum, a cantilever with a high Q-factor is desired in order to achieve a lower minimal detectable force. The reflective coating can also increase the low-frequency force noise. In contact mode and force spectroscopy, a cantilever with minimal low-frequency force noise is desirable. We present a study on cantilevers with a partial reflective coating on the detector side. For this study, soft (≈0.01 N/m) and stiff (≈28 N/m) rectangular cantilevers were used with a custom partial coating at the tip end of the cantilever. The Q-factor, the detection and the force noise of fully coated, partially coated and uncoated cantilevers are compared and force distance curves are shown. Our results show an improvement in low-frequency force noise and increased Q-factor for the partially coated cantilevers compared to fully coated ones while maintaining the same reflectivity, therefore making it possible to combine the best of both worlds.

Atomic Force Microscopy Based Tunable Local Anodic Oxidation of Graphene

Nano Letters ◽  
2011 ◽  
Vol 11 (11) ◽  
pp. 4542-4546 ◽  
Author(s):  
Satoru Masubuchi ◽  
Miho Arai ◽  
Tomoki Machida
Keyword(s):  
Atomic Force Microscopy ◽  
Anodic Oxidation ◽  
Force Microscopy ◽  
Atomic Force ◽  
Local Anodic Oxidation

Investigation of humidity-dependent size control of local anodic oxidation on graphene by using atomic force microscopy

2015 ◽  
Vol 66 (4) ◽  
pp. 617-620 ◽  
Author(s):  
Seoknam Ko ◽  
Seong jun Lee ◽  
Maengho Son ◽  
Doyeol Ahn ◽  
Seung-Woong Lee
Keyword(s):  
Atomic Force Microscopy ◽  
Anodic Oxidation ◽  
Size Control ◽  
Force Microscopy ◽  
Atomic Force ◽  
Local Anodic Oxidation
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