Cross-Coupling Controller for Five Degree-of-Freedom Coplanar Nanostage
2013 ◽
Vol 284-287
◽
pp. 1788-1793
Keyword(s):
The proposed approach is to design a tracking controller for five degree-of-freedom coplanar nanostage which can provide high precision applications. This study propose a viscoelastic creep model, it was modeled as a series connection of springs and dampers to describe the creep effect. Then, utilize a PI controller using Taguchi method to search the optimization parameters to suppress the tracking error. Finally, a cross-coupling control scheme is proposed to eliminate the contour error which is typical in dual-axes tracking control problem. The developed approaches are numerically and experimentally verified which demonstrate performance and applicability.
2010 ◽
Vol 663-665
◽
pp. 902-905
2021 ◽
2020 ◽
Vol 42
(13)
◽
pp. 2482-2491
Keyword(s):
2003 ◽
Vol 2003
(0)
◽
pp. 529-534
◽
2015 ◽
Vol 98
◽
pp. 12-20
◽
Keyword(s):