Growth of CuInGaSe2 Films by RF Sputtering Using CuInGaSe2 Single Phase Target
2013 ◽
Vol 372
◽
pp. 571-574
Keyword(s):
CuIn0.8Ga0.2Se2 thin film is grown at room temperature by RF sputtering using high quality of CuIn0.8Ga0.2Se2 single phase target. A (112) diffraction peak is dominant with no secondary phases such as selenide materials in the X-ray diffraction pattern. A flat and homogeneous surface can be obtained in the sample.
2012 ◽
Vol 29
(1)
◽
pp. 50