The Influence of Substrate on the Mechanical and Tribological Characteristics of MEMS Materials for Space Applications

2014 ◽  
Vol 658 ◽  
pp. 329-334
Author(s):  
Violeta Merie ◽  
Marius Pustan ◽  
Corina Birleanu ◽  
Gavril Negrea
Keyword(s):  
Thin Films ◽  
Mems Devices ◽  
Space Applications ◽  
Thermal Evaporation Method ◽  
Gold Silver ◽  
Silver Thin Films ◽  
Influence Of Substrate ◽  
Materials Used ◽  
Mechanical And Tribological Characteristics ◽  
Substrate Nature

Aluminum, gold, silver, nickel, silicon, glass, silicon dioxide, silicon nitride and so on, employed as bulk materials or thin films, represent the most commonly used materials for MEMS applications within the automotive, biomedicine, spatial industries and so forth. This work is a study regarding the influence of substrate nature on the mechanical properties of silver thin films elaborated for MEMS devices. The silver thin films were obtained by thermal evaporation method under vacuum protection on three different substrates. Glass, plastic (polycarbonate) and steel (C45) respectively are the materials used for the substrates. Further, atomic force microscopy investigations were performed on the elaborated samples in order to characterize them at a nanoscale and establish substrates influence. The Young’s modulus, nanohardness and roughness of the researched samples are the characteristics that were determined. A significant influence of substrate nature on the properties mentioned above for the studied silver thin films was marked out.

scholarly journals Substrate Influence on the Mechanical and Tribological Characteristics of Gold Thin Films for MEMS Applications

2015 ◽  
Vol 13 ◽  
pp. 59-66
Author(s):  
Violeta Merie ◽  
Marius Pustan ◽  
Corina Bîrleanu ◽  
Gavril Negrea ◽  
Ovidiu Belcin
Keyword(s):  
Thin Films ◽  
Nanoelectromechanical Systems ◽  
Space Applications ◽  
Thermal Evaporation Method ◽  
Force Microscopy ◽  
Mechanical And Tribological Properties ◽  
Gold Thin Films ◽  
Influence Of Substrate ◽  
Mechanical And Tribological Characteristics ◽  
Substrate Nature

The development of micro-and nanoelectromechanical systems (MEMS/NEMS) makes use of different thin films such as aluminum, gold, silicon, silver, titanium nitride, silicon carbide etc. This study is a research concerning the influence of substrate nature on the tribological and mechanical characteristics of gold thin films elaborated by thermal evaporation method, for space applications. Three different substrates were employed, namely: C45 steel, plastic (polycarbonate) and glass. Atomic force microscopy investigations were performed in order to characterize the obtained thin films at nanoscale. The nanohardness, Young’s modulus, roughness and the friction force are some characteristics that were determined. A significant influence of substrate nature on both mechanical and tribological properties of researched gold thin films was marked out. Regarding the topography, the smallest roughness was determined on the gold thin films deposited on glass substrate.

Influence of Substrate Temperature on Some Properties of Close-Spacing Thermally Evaporated CdTe Thin Films

2008 ◽  
Vol 55-57 ◽  
pp. 881-884 ◽  
Author(s):  
Thitinai Gaewdang ◽  
N. Wongcharoen ◽  
P. Siribuddhaiwon ◽  
N. Promros
Keyword(s):  
Thin Films ◽  
Substrate Temperature ◽  
Suitable Condition ◽  
Xrd Analysis ◽  
Thermal Evaporation Method ◽  
Cdte Thin Films ◽  
Influence Of Substrate ◽  
Substrate Temperatures ◽  
Deposited Films ◽  
Resistance Value

CdTe thin films with different substrate temperatures have been deposited by thermal evaporation method on glass substrate in vacuum chamber having low pressure about 3.0x10-5 mbar. According to XRD analysis, CdTe thin films are polycrystalline belonging to cubic structure with preferential orientation of (111) plane. The strongest peak intensity of XRD is observed in the film prepared with substrate temperature of 150°C. Band gap and band tail values of the as-deposited films were evaluated from the optical transmission spectra. The lowest dark sheet resistance value was obtained from the film prepared with substrate temperature of 150°C as well. Regarding to our experimental results, it may be indicated that the 150°C substrate temperature is the most suitable condition in preparing CdTe thin films for solar cell applications.

Adhesion and the cold welding of gold-silver thin films

2010 ◽  
Vol 107 (4) ◽  
pp. 043519 ◽  
Author(s):  
Wali O. Akande ◽  
Yifang Cao ◽  
Nan Yao ◽  
Wole Soboyejo
Keyword(s):  
Thin Films ◽  
Cold Welding ◽  
Gold Silver ◽  
Silver Thin Films

scholarly journals The structural effects on silver nanoparticles plasma edges in optical reflectance spectra of Ag/Ag2O composites synthesized by oxygen plasma treatment of silver thin films

2021 ◽  
Author(s):  
Kamal Hamed Kayed
Keyword(s):  
Thin Films ◽  
Silver Nanoparticles ◽  
Oxygen Plasma ◽  
Reflectance Spectra ◽  
Oxygen Plasma Treatment ◽  
Structural Effects ◽  
Optical Reflectance ◽  
Thermal Evaporation Method ◽  
Oxidation Rates ◽  
Silver Thin Films

Abstract In this work, we present the results of a unique study that aims to detect the structural effects on the plasma edges in optical reflectance spectra of Ag/Ag2O composites synthesized by treating silver thin films manufactured by thermal evaporation method with oxygen plasma afterglow. The results showed that, each of the optical reflectance spectra contains two plasma edges, the first (λI) belongs to the surface plasmons of the individual silver nanoparticles, and the second (λL) belongs to the larger silver nanoparticles. In addition, we found that the positions of the plasma edges are linearly related to the positions of the optical absorption peaks, except for high and low oxidation rates cases. On the other hand, taking into account previous work, we obtained indications that, the ratio NI/NL may be a measure of the film's effectiveness in inhibiting bacteria.

Influence of Substrate Nature and Annealing on Electro-Optical Properties of ZnO Thin Films

2007 ◽  
Author(s):  
Felicia Iacomi ◽  
C. Baban ◽  
Nicoleta Iftimie ◽  
Petronela Prepelita ◽  
D. Luca
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Zno Thin Films ◽  
Influence Of Substrate ◽  
Substrate Nature

Influence of substrate nature on the growth of copper oxide thin films

2016 ◽  
Vol 48 (12) ◽  
pp. 1294-1298 ◽  
Author(s):  
A. S. Bhattacharyya ◽  
S. K. Raj ◽  
Parameshwar Kommu ◽  
P. Prabhakar ◽  
R. Praveen Kumar ◽  
...  
Keyword(s):  
Thin Films ◽  
Copper Oxide ◽  
Oxide Thin Films ◽  
Influence Of Substrate ◽  
Substrate Nature

Deposition and Characterization of Al2O3 and BiFeO3 Thin Films on Titanium Substrates for Tough MEMS Devices

2017 ◽  
Vol 137 (1) ◽  
pp. 46-47
Author(s):  
Takeshi Kohno ◽  
Masato Mihara ◽  
Ataru Tanabe ◽  
Takashi Abe ◽  
Masanori Okuyama ◽  
...  
Keyword(s):  
Thin Films ◽  
Mems Devices ◽  
Titanium Substrates

X- ray diffraction and dielectric properties of PbSe thin films

2019 ◽  
Vol 15 (34) ◽  
pp. 1-14
Author(s):  
Bushra A. Hasan
Keyword(s):  
Thin Films ◽  
Thermal Activation ◽  
Thermal Evaporation ◽  
Thermal Activation Energy ◽  
Dielectric Constants ◽  
Conductivity Measurements ◽  
X Ray Diffraction ◽  
Thermal Evaporation Method ◽  
X Ray ◽  
Glass Substrates

Lead selenide PbSe thin films of different thicknesses (300, 500, and 700 nm) were deposited under vacuum using thermal evaporation method on glass substrates. X-ray diffraction measurements showed that increasing of thickness lead to well crystallize the prepared samples, such that the crystallite size increases while the dislocation density decreases with thickness increasing. A.C conductivity, dielectric constants, and loss tangent are studied as function to thickness, frequency (10kHz-10MHz) and temperatures (293K-493K). The conductivity measurements confirm confirmed that hopping is the mechanism responsible for the conduction process. Increasing of thickness decreases the thermal activation energy estimated from Arhinus equation is found to decrease with thickness increasing. The increase of thickness lead to reduce the polarizability α while the increasing of temperature lead to increase α.

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