Formation and Evolution of Cu Nanostructures on the Surface of Nanosized Cu Films under High Vacuum Annealing

2011 ◽  
Vol 361-363 ◽  
pp. 1582-1588
Author(s):  
Jiang Bin Su ◽  
Lun Xiong Li ◽  
Xian Fang Zhu
Keyword(s):  
Thermal Activation ◽  
Vacuum Annealing ◽  
High Vacuum ◽  
Film Surface ◽  
Activation Effect ◽  
Cu Films ◽  
Full Explanation ◽  
Formation And Evolution ◽  
20 Nm ◽  
Cu Nanostructures

Nanosized Cu films were prepared by direct current (dc) magnetron sputtering method at room temperature. The as-deposited Cu films were subsequently annealed under high vacuum annealing for different time. It was observed that with the annealing various types of Cu nanostructures formed on the surface of films. It was also observed that the appropriate range of film thickness for such formation was from 20 nm to 40 nm. During the annealing, three types of nanoparticles and considerable number of even tiny crystallites forming on the film surface were crucial for the formation. Furthermore, the detailed formation and evolution were studied and two possible mechanisms, i.e., surface nanocurvature effect and thermal activation effect, were proposed for a full explanation.

The Microstructure and Electrical Property of Porous Cu Film on Soft PVDF Substrate

2012 ◽  
Vol 472-475 ◽  
pp. 1451-1454
Author(s):  
Xue Hui Wang ◽  
Wu Tang ◽  
Ji Jun Yang
Keyword(s):  
Electrical Properties ◽  
Film Surface ◽  
X Ray Diffraction ◽  
Si Substrate ◽  
X Ray ◽  
Cu Films ◽  
Cu Film ◽  
Diffraction Peaks ◽  
Sputtering Pressure ◽  
Effect Method

The porous Cu film was deposited on soft PVDF substrate by magnetron sputtering at different sputtering pressure. The microstructure and electrical properties of Cu films were investigated as a function of sputtering pressure by X-ray diffraction XRD and Hall effect method. The results show that the surface morphology of Cu film is porous, and the XRD revealed that there are Cu diffraction peaks with highly textured having a Cu-(220) or a mixture of Cu-(111) and Cu-(220) at sputtering pressure 0.5 Pa. The electrical properties are also severely influenced by sputtering pressure, the resistivity of the porous Cu film is much larger than that fabricated on Si substrate. Furthermore, the resistivity increases simultaneously with the increasing of Cu film surface aperture, but the resistivity of Cu film still decreases with the increasing grain size. It can be concluded that the crystal structure is still the most important factor for the porous Cu film resistivity.

Water Desorption from Magnesium Oxide Films Fabricated by Chemical Vapor Deposition

2006 ◽  
Vol 11-12 ◽  
pp. 693-696 ◽  
Author(s):  
S. Kawaguchi ◽  
K.C. Namiki ◽  
S. Ohshio ◽  
Junichi Nishino ◽  
H. Saitoh
Keyword(s):  
Chemical Vapor Deposition ◽  
Magnesium Oxide ◽  
Vapor Deposition ◽  
High Vacuum ◽  
Secondary Electron Emission ◽  
Film Surface ◽  
Chemical Vapor ◽  
Ultra High Vacuum ◽  
Water Desorption ◽  
Plasma Sputtering

Magnesium oxide (MgO) films are utilized for the anti-plasma sputtering coating with excellent ability of secondary electron emission in plasma display panels (PDP). These properties are degraded by the impurities adsorbed on the film surface. Therefore, we should obtain impurity-free surface during the PDP manufacturing process. We have synthesized whisker and continuous film types of metal oxide using a chemical vapor deposition (CVD) method operated under atmosphere. In this study, a temperature programmed desorption method has been applied to detect residual species adsorbed on the surface of the present films in the ultra-high vacuum atmosphere. The amount of water adsorption was determined by this method.

scholarly journals Synthesis, Characterization, and Properties of Nanophase Ceramics

1988 ◽  
Vol 132 ◽  
Author(s):  
R. W. Siegel ◽  
J. A. Eastman
Keyword(s):  
High Vacuum ◽  
Synthesis Method ◽  
Ultra High Vacuum ◽  
Vacuum Consolidation ◽  
Fracture Characteristics ◽  
Gas Condensation ◽  
Ultrafine Grained ◽  
20 Nm ◽  
Reduced Scale

ABSTRACTUltrafine-grained ceramics have been synthesized by the production of ultrafine (2–20 nm) particles, using the gas-condensation method, followed by their in-situ, ultra-high vacuum consolidation at room temperature. These new nanophase ceramics have properties that are significantly improved relative to those of their coarser-grained, conventionally-prepared counterparts. For example, nanophase rutile (TiO2) with an initial mean grain diameter of 12 nm sinters at 400 to 600°C lower temperatures than conventional powders, without the need for compacting or sintering aids. The sintered nanophase rutile exhibits both improved microhardness and fracture characteristics. These property improvements result from the reduced scale of the grains and the increased cleanliness of the particle surfaces and the subsequently-formed grain boundaries. Research completed on the synthesis, characterization, and properties of nanophase ceramics is reviewed and the potential for using the nanophase synthesis method for engineering new and/or improved ceramics and composites is considered.

Hydrolytic Lignin: It’s Activated and Fluorinated Forms

2019 ◽  
Vol 806 ◽  
pp. 100-105 ◽  
Author(s):  
Yury M. Nikolenko ◽  
Alexander K. Tsvetnikov ◽  
Alexander Yu. Ustinov ◽  
Vladimir E. Silant'ev ◽  
Valery G. Kuryavyi ◽  
...  
Keyword(s):  
Thermal Activation ◽  
Energy Intensity ◽  
Electronic Conductivity ◽  
High Vacuum ◽  
Electrochemical Process ◽  
Physical Activation ◽  
Operating Voltage ◽  
Thermally Activated ◽  
Hydrolytic Lignin ◽  
Structural Blocks

The hydrolytic lignin (HL) derivatives have been prepared via its physical activation (high-temperature annealing in vacuum) followed by chemical modification (fluorination). It was found that the graphitized product of thermal activation up to 1000 °C at a low temperature gain rate of < 2 °C/min under high vacuum shows an enhanced specific surface area (215 m2/g), that makes it potentially useful as sorbent, catalytic substrate, or electrode material. It was revealed from the experimental data the manufactured graphitized material consists of nanometric structural blocks, possibly nanographites and/or few-layer nanographenes. The edges of graphenes in agglomerates in activated hydrolytic lignin (AHL) have armchair and zigzag shapes. The nontrivial electronic structure of the zigzag edges, along with the electronic conductivity and the ability of AHL to absorb oxygen, can cause an increase in the energy intensity of lithium battery (LB) manufactured using AHL.The carbon-fluorine bond of semi-ionic type was detected in HL and AHL fluorinated in the temperature range of synthesize 60 – 300 oC. The fluorinated forms of both HL and its thermally activated product show increased values of operating voltage due to the participation of fluorine bound to carbon in the electrochemical process.

Shadow Edge Lithography for Wafer-Scale Nanofabrication

2007 ◽  
Author(s):  
John Guofeng Bai ◽  
Jae-Hyun Chung
Keyword(s):  
High Vacuum ◽  
High Yield ◽  
Robust Method ◽  
Virtual Source ◽  
Ultraviolet Lithography ◽  
Wafer Scale ◽  
Shadow Effect ◽  
Etching Mask ◽  
Nanoscale Patterns ◽  
20 Nm

We propose shadow edge lithography (SEL) as a wafer-scale nanofabrication method. The shadow effect of “line-ofsight” in high-vacuum evaporation is analyzed theoretically to predict the geometric distributions of the fabricated nanoscale gaps. In the experiment, nanoscale gap patterns are created by the shadow of Al edges which are prepatterned using e-beam evaporation and the conventional ultraviolet lithography. Feasibility of the SEL is demonstrated by the fabrication of nanogaps having the width ranging from 15 to 100 nm on 4-inch Si wafers. Furthermore, by using the height differences in the prepatterned Al edges to compensate the geometric distributions of the shadow effect, it is demonstrated that the uniformity tolerance in the nanogap width can be ±1 nm or ±5% across the 4-inch Si wafers at a resolution down to 20 nm. The experimental results agree well with the theoretical prediction considering the virtual source during the e-beam evaporation. Upon the nanogap fabrication, arrays of nanochannels are obtained by reactive ion etching (RIE) using the evaporated Al layers as the etching mask. Our results show that that the evaporated Al layers can be used as the RIE mask to transfer the nanoscale patterns with a high yield and throughput. Thus, the SEL provides a robust method for wafer-scale fabrication especially for sub 50-nm structures.

Hydrogen-related structural changes on CVD diamond (1 0 0) surfaces by ultra-high-vacuum annealing

2003 ◽  
Vol 216 (1-4) ◽  
pp. 59-64 ◽  
Author(s):  
J. Nakamura ◽  
S. Fukumoto ◽  
T. Teraji ◽  
H. Murakami ◽  
T. Ito
Keyword(s):  
Structural Changes ◽  
Vacuum Annealing ◽  
High Vacuum ◽  
Cvd Diamond ◽  
Ultra High Vacuum

SYNTHESIS OF COMPOSITES BASED ON SILICON-MODIFIED DETONATION NANODIAMONDS

1970 ◽  
Vol 61 (11) ◽  
Author(s):  
Vladimir T. Senyut ◽  
Petr A. Vityaz ◽  
Igor V. Val’kovich ◽  
Alexander M. Parnitsky ◽  
Vladimir A. Rzhetsky
Keyword(s):  
Pressure Range ◽  
Vacuum Annealing ◽  
Nanocrystalline Structure ◽  
Polycrystalline Diamond ◽  
Adsorbed Water ◽  
Surface Functional Groups ◽  
Reducing Atmosphere ◽  
Annealing Conditions ◽  
The Hierarchical Structure ◽  
20 Nm

Scientific approaches to the formation of composite materials such as «nanodiamond-nanostructured SiC» have been developed. It is shown that, as a result of vacuum heat treatment, nanodiamonds are graphitized and nanostructured graphite-like coating forms on their surface. In this case, the reduction in the mass of the nanodiamond powder after vacuum annealing reaches 20 – 30 wt. % by removing oxygen-containing surface functional groups, physically and chemically adsorbed water. In accordance with the developed technology chemical-thermal modifying of nanodiamonds by silicon is carried out by annealing in a reducing atmosphere in the temperature range of 873–1273 К in the presence of silicon halides. On the basis of carbon and silicon modified nanodiamonds under vacuum annealing conditions a composite nanostructured powder of nanodiamond-SiC with particles of size from 0.1 to 5 μm is obtained. As a result of thermobaric sintering of the modified powder in the pressure range of 1.0 – 2.5 GPa, a compact diamond composite material consisting of polycrystalline diamond grains of 0.2 – 0.5 μm in size is formed. The size of diamond subgrains is 50 – 100 nm, and the presence of nanodiamonds measuring 10 – 20 nm is noted between large polycrystalline grains. As a result of grinding of the synthesized compacts, a polycrystalline diamond micropowder with particles of size up to 50 μm, characterized by submicron- and nanocrystalline structure is obtained. Due to the hierarchical structure of the sintered particles (particle-grain-subgrain-nanodiamond crystallite), powders based on the obtained material are promising in finishing technologies for brittle nonmetallic materials.

Study of the interfacial SiO2 scavenging in HfO2/SiO2/Si stacks through the ultra-high vacuum annealing

2013 ◽  
Author(s):  
X. Li ◽  
T. Yajima ◽  
T. Nishimura ◽  
K. Nagashio ◽  
A. Toriumi
Keyword(s):  
Vacuum Annealing ◽  
High Vacuum ◽  
Ultra High Vacuum
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