Stability of the Vanadium Oxide Films Forme by Reactive Sputtering and Ion Beam Enhanced Deposition Methods

2011 ◽  
Vol 399-401 ◽  
pp. 589-592 ◽  
Author(s):  
Chang Liu ◽  
Mei Ping Jiang ◽  
Jin Hua Li ◽  
Sa Ke Wang
Keyword(s):  
Oxide Film ◽  
Vanadium Oxide ◽  
Vanadium Dioxide ◽  
Infrared Imaging ◽  
Ion Beam ◽  
Infrared Detector ◽  
Oxide Films ◽  
Reactive Sputtering ◽  
Fatigue Tests ◽  
Vanadium Oxide Films

Vanadium oxide film is a common sensing film for infrared detector and uncooled infrared imaging devices, its stability directly affects the use of the thetse infrared devices.In this paper, high and low temperature cycles fatigue tests was used to check and compare the stability of the vanadium oxide films formed by different methods.The change of the temperature coefficient of resistance(TCR) and the room temperature resistance were measured and compared for the vanadium oxide film prepared by reactive sputtering and vanadium dioxide films by Ion Beam Enhanced Deposition(IBED) method. The result indicated tungsten doped Vanadium dioxide film by IBED is the most stable and has a higher TCR.

Thin Films of Nanocrystalline Vanadium Dioxide: Modification of the Properties, and Electrical Switching

2020 ◽  
Vol 854 ◽  
pp. 103-108
Author(s):  
A.L. Pergament ◽  
O.Ya. Berezina ◽  
S.V. Burdyukh ◽  
V.P. Zlomanov ◽  
Evgeniy A. Tutov
Keyword(s):  
Thin Films ◽  
Vanadium Oxide ◽  
Vanadium Dioxide ◽  
Sol Gel ◽  
Oxide Films ◽  
Threshold Value ◽  
Implantation Dose ◽  
Electrical Switching ◽  
Hydrogen Implantation ◽  
Vanadium Oxide Films

Vanadium oxide films have been fabricated by the acetylacetonate and triethoxy vanadyl sol-gel methods on silicon substrates, as well as by magnetron sputtering on glass-ceramic substrates. Additional annealing in reducing atmosphere results in formation of vanadium dioxide or mixed phases with a VO2 predominance. The obtained films demonstrate the metal-insulator transition and electrical switching. In the films produced from triethoxy vanadyl, the peculiarities of electrical properties are related to the size effect, heterophase character of vanadium oxide films, and different types of charge carriers in the bulk of nanocrystallites and on their surfaces. Also, the effect of doping with hydrogen by means of plasma-immersion ion implantation on the properties of vanadium dioxide is explored. It is shown that the transition parameters in VO2 thin films depend on the hydrogen implantation dose. At doses exceeding a certain threshold value, the films are metallized, and the phase transition no longer occurs.

Synthesis and characterization of vanadium oxide films by post-oxidation and reactive sputtering

2007 ◽  
Vol 141 (3) ◽  
pp. 108-114 ◽  
Author(s):  
A. Khodin ◽  
Hak-In Hwang ◽  
Sung-Min Hong ◽  
V. Zalessky ◽  
T. Leonova ◽  
...  
Keyword(s):  
Vanadium Oxide ◽  
Oxide Films ◽  
Reactive Sputtering ◽  
Synthesis And Characterization ◽  
Vanadium Oxide Films

Annealing and Persistent Photoconductivity Effects in Amorphous and Crystalline Vanadium Oxide Films

2006 ◽  
Vol 928 ◽  
Author(s):  
Jason Kekas ◽  
Anuj Dhawan ◽  
Praveen Gollakota ◽  
John Muth
Keyword(s):  
Vanadium Oxide ◽  
Vanadium Dioxide ◽  
Oxide Films ◽  
Laser Deposition ◽  
Metallic State ◽  
Persistent Photoconductivity ◽  
Amorphous Films ◽  
Optical Effects ◽  
Crystalline Films ◽  
Vanadium Oxide Films

ABSTRACTVanadium dioxide films have long attracted attention because of the phase transition between the semiconducting state and the metallic state at 68 degrees centigrade. Vanadium oxide films have been prepared by a variety of methods, including the annealing and oxidation of evaporated vanadium under controlled conditions. In this study we explore a different route by producing amorphous and crystalline VOx films by pulsed laser deposition and annealing under a variety of conditions. We found that that in amorphous films grown at lower temperatures and then annealed, persistent photoconductivity effects can be observed, while in epitaxial crystalline films grown at high temperature, persistent effects were not observed. Furthermore, it was found that for some crystalline films persistent optical effects were observed and that optical hysteresis was dependent on the amount of time after the film anneal.

Vanadium oxide films for optical modulation applications

2006 ◽  
Author(s):  
S. Paradis ◽  
P. Mérel ◽  
P. Laou ◽  
D. Alain
Keyword(s):  
Vanadium Oxide ◽  
Oxide Films ◽  
Optical Modulation ◽  
Vanadium Oxide Films
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