Design of Tactile Sensor for Measuring Orthocenter Deviation and Friction in Wafer Transmission Process

In order to raise position accuracy and stability in wafer transmission process, a tactile sensing system which can measure both deviation of wafer to manipulator and friction acting on wafer simultaneously is introduced. Analysis on kinetic model abstracted from sensing system is made, and following algorithms are applied: micro displacement is calculated through pressure values acting on different sensing units, and meanwhile friction is calculated from relative velocity between permanent magnet and inductance. Through simulation, indicators of sensing unit are established. This sensing system has the capacity of detecting deviation ranging 0-5 mm with resolution 0.05 mm and measure friction ranging 0-0.64 N. The results indicate that this sensing system meets the requirements in orthocenter deviation and friction measurement in wafer transmission process.

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Design of Three-dimensional Tactile Sensor Applying Optical Waveguide Plate Based on FEM Contact Analysis and Implementation of Robotic Tactile Sensing System Using Image Data Processing Technique

Computational Mechanics ’95 ◽

10.1007/978-3-642-79654-8_242 ◽

1995 ◽

pp. 1492-1497

Author(s):

M. Ohka ◽

Y. Mitsuya ◽

S. Takeuchi ◽

O. Kamekawa

Keyword(s):

Data Processing ◽

Optical Waveguide ◽

Three Dimensional ◽

Image Data ◽

Tactile Sensor ◽

Processing Technique ◽

Contact Analysis ◽

Tactile Sensing ◽

Sensing System ◽

Data Processing Technique

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Stochastic resonance aided tactile sensing

Robotica ◽

10.1017/s0263574708005043 ◽

2009 ◽

Vol 27 (4) ◽

pp. 633-639 ◽

Cited By ~ 8

Author(s):

Masahiro Ohka ◽

Shingo Kondo

Keyword(s):

Stochastic Resonance ◽

Signal To Noise Ratio ◽

Measurement Data ◽

Local Maximum ◽

Tactile Sensor ◽

Living Environment ◽

Tactile Sensing ◽

Object Surface ◽

Sensing System ◽

Surface Scan

SUMMARYStochastic resonance (SR) is one of the basic principles intrinsically possessed by any living thing to highly adapt to complicated environments including various disturbances. Although a noise is inevitably mixed by contact with an object and a sensor's movement on it in tactile sensing, a human being can evaluate the several micrometers of unevenness on the object surface by means of SR. We intend to apply SR to tactile sensing and to develop a tactile sensing system capable of measuring an object surface with high precision in not only a controlled environment like a precision measurement room but also in a living environment. First, we investigate the SR characteristic possessed by a Hodgkin–Huxley model capable of emulating squid's neuron activities. According to the simulation results, we develop a new electronic circuit capable of generating the SR. We perform the object surface scan using a linear stage equipped with a tactile sensor and the circuit. A series of object surface scanning tests is repeated while changing the intensity of applied noise, and the signal to noise ratio (SNR, hereafter) is calculated from the obtained measurement data to check the effect of the SR. In the experiment, striped textures with a height of δ = 5 ~ 30 μm are used as specimens. The SNR changes depending on the noise intensity, and the local maximum appears under a proper noise. It is found that the sensing accuracy is improved according to the aforementioned SR theory. Therefore, SR, which is usually applied to noisy environments, is effective for a tactile sensing system.

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Use of Artificial Neural Network for Identification of Object using Tactile Sensing System

IETE Journal of Research ◽

10.1080/03772063.2000.11416181 ◽

2000 ◽

Vol 46 (5) ◽

pp. 381-385

Author(s):

Satish Mishra ◽

S Joshi ◽

D C Gharpure

Keyword(s):

Neural Network ◽

Artificial Neural Network ◽

Tactile Sensing ◽

Sensing System ◽

Artificial Neural

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STAND-UP MOTION SUPPORT BY A MOBILE MANIPULATOR SYSTEM WITH HIGH SPEED TACTILE SENSORS

International Journal of Information Acquisition ◽

10.1142/s0219878911002458 ◽

2011 ◽

Vol 08 (03) ◽

pp. 181-195

Author(s):

ZHAOXIAN XIE ◽

HISASHI YAMAGUCHI ◽

MASAHITO TSUKANO ◽

AIGUO MING ◽

MAKOTO SHIMOJO

Keyword(s):

Fuzzy Logic ◽

Feedback Control ◽

Experimental Verification ◽

High Speed ◽

Center Of Pressure ◽

Tactile Sensor ◽

Mobile Manipulator ◽

Tactile Sensing ◽

Robot Arm ◽

Tactile Sensors

As one of the home services by a mobile manipulator system, we are aiming at the realization of the stand-up motion support for elderly people. This work is charaterized by the use of real-time feedback control based on the information from high speed tactile sensors for detecting the contact force as well as its center of pressure between the assisted human and the robot arm. First, this paper introduces the design of the tactile sensor as well as initial experimental results to show the feasibility of the proposed system. Moreover, several fundamental tactile sensing-based motion controllers necessary for the stand-up motion support and their experimental verification are presented. Finally, an assist trajectory generation method for the stand-up motion support by integrating fuzzy logic with tactile sensing is proposed and demonstrated experimentally.

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Representation and tactile sensing of 3-D objects by a gripper finger

Robotica ◽

10.1017/s0263574700002149 ◽

1983 ◽

Vol 1 (4) ◽

pp. 217-222 ◽

Cited By ~ 6

Author(s):

Gen-Ichiro Kinoshita

Keyword(s):

Tactile Sensor ◽

Large Displacement ◽

Tactile Sensing ◽

Sensor Element ◽

Maximum Displacement

SUMMARYThe tactile sensor is constructed as a part of the finger of a parallel jaw hand; it is of the size of a finger and allows for a large displacement of the sensor element in response to force. The structure of the tactile sensor incorporates 20 successively and closely aligned elements, which allow for a 2.5 mm maximum displacement for each element. In the described experiments we present the capabilities of the tactile sensor. The tactile sensor has the functions of: 1) discriminating the shape of the partial surface of an object; and 2) tracing by finger on the surface along the profile of an object.

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