XRD Analysis of Cu-Al Interconnect Intermetallic Compound in an Annealed Micro-Chip

2012 ◽  
Vol 620 ◽  
pp. 166-172 ◽  
Author(s):  
Kok Yau Chua ◽  
May Ting Hng ◽  
Cher Chia Lee ◽  
T. Joseph Sahaya Anand

Cu-Al intermetallic compound (IMC) in Cu wire-Al bond pad interconnect interface is drawing attention of researches. However, due to thin IMC thickness, the characterizations of the IMC are limited to expensive and time consuming techniques. An evaluation is performed to use common X-Ray Diffraction (XRD) technique to identify the IMC in the Cu wired micro-chip samples in powder form. Existence of mixture of CuAl and CuAl2 was first confirmed by transmission electron microscope (TEM) and energy dispersive X-ray (EDX). In XRD analysis, peak correspond to CuAl phase is identified from measurement with slower scan configuration. The difficulty for IMC peak detection in diffractogram is due to low composition ratio of IMC relative to other materials available in the sample. KOH treatment for enhancing IMC peaks intensity does not work as expected as it etches the IMC as well.

2021 ◽  
Author(s):  
Yan Chen ◽  
Yuemei Lan ◽  
Dong Wang ◽  
Guoxing Zhang ◽  
Wenlong Peng ◽  
...  

A series of Gd2-xMoO6:xEu3+(x=0.18-0.38) nanophosphors were synthesized by the solvothermal method. The properties of this nanophosphor were characterized by x-ray diffraction (XRD), transmission electron microscope (TEM), fluorescence spectra and diffuse...


2011 ◽  
Vol 80-81 ◽  
pp. 217-220 ◽  
Author(s):  
Xue Qing Yue ◽  
Hai Jun Fu ◽  
Da Jun Li

Graphite encapsulated nickel nanoparticles were prepared by ball milling andsubsequently annealing a mixture of expanded graphite with nickel powders. The products were characterized by transmission electron microscope and X-ray diffraction. The formation mechanism of the products was discussed. Results show that the products have a size range of 20-150 nm. The graphite and nickel in the products all exhibit a high crystallinity.


2011 ◽  
Vol 311-313 ◽  
pp. 1713-1716 ◽  
Author(s):  
Yan Rong Sun ◽  
Tao Fan ◽  
Chang An Wang ◽  
Li Guo Ma ◽  
Feng Liu

Nano-hydroxyapatite with different morphology was synthesized by the co-precipitation method coupled with biomineralization using Ca(NO3)2•4H2O and (NH4)2HPO4 as reagents, adding chondroitin sulfate, agarose and aspartic acid as template. The structure and morphology of the prepared powders were characterized by X-ray diffraction (XRD) and transmission electron microscope (TEM).


Nanopages ◽  
2019 ◽  
pp. 1-11
Author(s):  
G. M. Taha ◽  
M. N. Rashed ◽  
M. S. El-Sadek ◽  
M. A. Moghazy

Abstract BiFeO3 (BFO) nanopowder was synthesized in a pure form via a sol- gel method based on glycol gel reaction. Effect of drying and preheating temperature on preventing other phases was studied. Many parameters were studied as calcination temperature and time & stirring temperature as well. The prepared powder was characterized by X-Ray Diffraction of powder (XRD) and Transmission Electron Microscope (TEM). High pure BiFeO3 was obtained by preheated process at 400 °C for 0.5 h and calcination at 600 °C for 0.5 h without any impurities compared to dry at110 °C.


2009 ◽  
Vol 79-82 ◽  
pp. 1719-1722
Author(s):  
Zhi Hong Zhang ◽  
Shao Yu Zhang ◽  
Xue Dong Liu

Attapulgite clay(ATP) from Xuyi county of China was purified by a wet method then treated with NaOH and 1.0 mol/L, 2.0 mol/L and 3.0 mol/L solutions of HCl. Transmission electron microscope(TEM) and X-ray diffraction (XRD) were used to characterize treated ATP. Results showed that wet purification could remove most of impurities. Treatment by alkaline and HCl of 1.0 mol/L and 2.0 mol/L could increase purity while treatment of 3.0 mol/L hydrochloric acid could dissolve some element of ATP so much as form SiO2 and destroy fiber structure to clips. Adsorption experiments of Fe3+ and Ni2+ from aqueous solutions were done using original ATP, purified ATP and treated ATP as absorbents. Results showed that Attapulgite could adsorb metal cations in significant amounts. Sodium hydroxide activation had little influence on adsorption capacity. Influences of acid treatments to ATP on adsorption capacity varied on different concentration solutions.


2010 ◽  
Vol 63 ◽  
pp. 392-395
Author(s):  
Yoshifumi Aoi ◽  
Satoru Furuhata ◽  
Hiromi Nakano

ZrN/TiN multi-layers were synthesized by ion beam sputtering technique. Microstructure and mechanical property of the ZrN/TiN multi-layers were characterized and the relationships between microstructure and hardness of the ZrN/TiN multi-layers with various bilayer thicknesses and thickness ratios were investigated. The microstructure of multi-layers have been investigated using transmission electron microscope (TEM) and X-ray diffraction (XRD).


2010 ◽  
Vol 177 ◽  
pp. 32-36 ◽  
Author(s):  
An Rong Wang ◽  
Jian Li ◽  
Qing Mei Zhang ◽  
Hua Miao

Weak magnetic ZnFe2O4 nanoparticles were prepared by coprecipitation and treated with different concentrations of Fe(NO3)3 solution. Untreated and treated particles were studied using a vibrating sample magnetometer, transmission electron microscope, by X-ray diffraction, X-ray energy dispersive spectroscopy and X photoelectron spectroscopy. The results showed that, after treatment, the ZnFe2O4/γ-Fe2O3 forms disphase nanoparticles, with enlarged size, enhanced magnetic properties and with a surface parceled with Fe(NO3)3. The size of the particles and their magnetic properties are related to the concentration of the treatment solution. The particle size and magnetic properties could be controlled by controlling the concentration of treating solution, therefore nanoparticles can be more widely used.


1998 ◽  
Vol 4 (S2) ◽  
pp. 856-857
Author(s):  
David M. Longo ◽  
James M. Howe ◽  
William C. Johnson

The focused ion beam (FIB) has become an indispensable tool for a variety of applications in materials science, including that of specimen preparation for the transmission electron microscope (TEM). Several FIB specimen preparation techniques have been developed, but some problems result when FIB specimens are analyzed in the TEM. One of these is X-ray fluorescence from bulk material surrounding the thin membrane in FIB-prepared samples. This paper reports on a new FIB specimen preparation method which was devised for the reduction of X-ray fluorescence during energy dispersive X-ray spectroscopy (EDS) in the TEM.Figure 1 shows three membrane geometries that were investigated in this study on a single-crystal Si substrate with a RF sputter-deposited 50 nm Ni film. Membrane 1 is the most commonly reported geometry in the literature, with an approximately 20 urn wide trench and a membrane having a single wedge with a 1.5° incline.


1998 ◽  
Vol 13 (6) ◽  
pp. 1511-1516 ◽  
Author(s):  
M. Umemoto ◽  
M. Udaka ◽  
K. Kawasaki ◽  
X. D. Liu

Recently, a new method, i.e., a plasma jet method, was developed in our lab for the production of ultrafine powders. In the present work, we investigated the formation of binary Al–Fe, Al–Si, Fe–Si, Al–Cu, Al–Ni, Ni–Ti, Fe–Cu, and Fe–Ti ultrafine powders using this method. Premixed pure elemental powders of various compositions of Al–Fe, Al–Si, Fe–Si, Al–Cu, Al–Ni, Ni–Ti, Fe–Cu, and Fe–Ti were used as starting materials. These premixed powders were injected into the plasma jet of Ar–N2 working gas to form ultrafine powders. The obtained ultrafine powders were characterized by x-ray diffraction and transmission electron microscope to check the microstructures of ultrafine particles.


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