Parameters Optimization of Laser Processing CVD Diamond Film Based on FEM Simulation

2010 ◽  
Vol 426-427 ◽  
pp. 26-29 ◽  
Author(s):  
X.J. Wu ◽  
Feng Xu ◽  
Dun Wen Zuo ◽  
Wen Zhuang Lu ◽  
M. Wang
Keyword(s):  
Temperature Distribution ◽  
Diamond Film ◽  
Laser Processing ◽  
Laser Power ◽  
Scanning Speed ◽  
Cvd Diamond ◽  
High Energy ◽  
Machining Parameters ◽  
Etching Depth ◽  
Cvd Diamond Film

Chemical vapor deposited (CVD) diamond film has a series of outstanding properties. However, it can not be easily machined by conventional technologies available currently for its high hardness and stability. Laser processing diamond film method can be an efficient way to process diamond film because of its high energy density. The mechanisms of laser processing diamond film are thermal oxidation, graphitization and evaporative ablation of graphite. Temperature distribution is of great importance to understand these complex phenomena taking place during the process because different temperatures lead to different physical and chemical changes of diamond. In this paper, the finite element method (FEM) software ANSYS is applied to calculate the temperature distribution. The relation between etching depth and laser machining parameters (laser power and scanning speed) is presented. The proper parameter ranges of laser power and scanning speed for a certain etching depth is also investigated with this method.

Indoor light on thermoluminescence of CVD diamond film used as a high-energy photon dosimeter

2003 ◽  
Vol 58 (1) ◽  
pp. 89-94 ◽  
Author(s):  
Chi-Chang Liu ◽  
Tieh-Chi Chu ◽  
Sung-Yen Lin ◽  
Jao-Perng Lin
Keyword(s):  
Diamond Film ◽  
Cvd Diamond ◽  
High Energy ◽  
High Energy Photon ◽  
Energy Photon ◽  
Cvd Diamond Film

Interface Temperature Measurement and Experimental Studies of Super-High Speed Polishing of CVD Diamond Films

2010 ◽  
Vol 135 ◽  
pp. 271-276
Author(s):  
Shu Tao Huang ◽  
Li Zhou ◽  
Li Fu Xu
Keyword(s):  
Stainless Steel ◽  
Temperature Measurement ◽  
Temperature Rise ◽  
Diamond Film ◽  
High Speed ◽  
Experimental Studies ◽  
Pure Titanium ◽  
Cvd Diamond ◽  
Interface Temperature ◽  
Cvd Diamond Film

Super-high speed polishing of diamond film is a newly proposed method due to its outstanding features such as low cost and simple apparatus. The interface temperature rise is due to the friction force and the relative sliding velocity between the CVD diamond film and the polishing metal plate surface. In this paper, the interface temperature rise in super-high speed polishing of CVD diamond film was investigated by using the single-point temperature measurement method. Additionally, the influence of polishing plate material on the characteristics of super-high speed polishing has been studied. The results showed that cast iron is not suitable for super-high polishing, while both 0Cr18Ni9 stainless steel and pure titanium can be used for the super-high polishing of CVD diamond film. The quality and efficiency of polishing with 0Cr18Ni9 stainless steel plate is much higher than those of pure titanium, and the material removal rate could reach to 36-51 m/h when the polishing speed and pressure are 100 m/s and 0.17-0.31 MPa, respectively.

scholarly journals Synthesis of Microwave Plasma CVD Diamond-Film on Variously-Coated Carbon-Steel Substrates.

1996 ◽  
Vol 47 (7) ◽  
pp. 611-615
Author(s):  
Hiroyuki TANAKA ◽  
Toshiaki TANAKA ◽  
Hideaki SOHMA ◽  
Masato YOSHIDA ◽  
Akira SAKAI ◽  
...  
Keyword(s):  
Carbon Steel ◽  
Diamond Film ◽  
Microwave Plasma ◽  
Cvd Diamond ◽  
Plasma Cvd ◽  
Microwave Plasma Cvd ◽  
Cvd Diamond Film ◽  
Steel Substrates ◽  
Coated Carbon

scholarly journals Study on Polishing of CVD Diamond Film (2nd report)

2005 ◽  
Vol 71 (12) ◽  
pp. 1541-1547
Author(s):  
Tsuyoshi YOKOSAWA ◽  
Jun-ichiro TAKAGI ◽  
Seiji KATAOKA
Keyword(s):  
Diamond Film ◽  
Cvd Diamond ◽  
Cvd Diamond Film

Effect of Laser Processing Parameters on Microhole Quality of Aluminium Nitride Ceramics

2021 ◽  
Vol 871 ◽  
pp. 277-283
Author(s):  
Chun Yan Yang ◽  
Yun Hao ◽  
Bozhe Wang ◽  
Hai Yuan ◽  
Liu Hui Li
Keyword(s):  
Laser Processing ◽  
Laser Power ◽  
Picosecond Laser ◽  
Scanning Speed ◽  
Processing Parameters ◽  
Recast Layer ◽  
Aluminium Nitride ◽  
Obvious Effect ◽  
Nitride Ceramics

A picosecond laser in spin-cutting mode was used to drill 500μm diameter microholes on 150μm thick aluminium nitride ceramic. The effects of laser processing parameters such as the laser power, scanning speed, and defocus amount on the microhole quality were studied. The results show that as the laser power increases, the inlet and outlet diameters of the holes increase, the taper decreases slightly, and the thickness of the recast layer decreases evidently. The scanning speed has no obvious effect on the diameter and taper of the hole; however, the hole can not be drilled through when the speed is too large. Positive defocus can effectively reduce the taper of the hole. Under 28.5W laser power, 400Hz frequency, 200mm/s scanning speed, and zero defocus amount conditions, high-quality microholes with a taper of 0.85° were obtained.

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