A Valveless MEMS Pump Utilizing a Thin Film Permanent Magnet
2012 ◽
Vol 523-524
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pp. 551-556
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A valveless MEMS pump utilizing a multi-layer thin film NdFeB/Ta permanent magnet (TFPM) has been presented. The MEMS pump consists of a diaphragm actuator utilizing 6μm in thickness and 3 mm in diameter TFPM which is bonded on a membrane made of polydimethylsiloxane (PDMS) of about 80μm thickness, a pump chamber and a pair of diffuser elements. TFPM is sputtered on a 50μm thick Nb sheet. The diffuser elements are used to generate a one-way fluid flow. The chamber is made of acryl plates. UV negative film resist is used to bond different layers. Applying amplitude of ±7.5V square wave voltage, the pump flow rate reaches to 130μL/min at frequency of 15Hz.
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2007 ◽
Vol 24
(Supplement 39)
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pp. 53
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2013 ◽
Vol 7
(2)
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pp. 196-204
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1998 ◽
Vol 116
(3)
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pp. 530-531
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2009 ◽
Vol 24
(3)
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pp. 245-249
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2015 ◽
Vol 802
◽
pp. 617-622
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2006 ◽
Vol 18
(Supplement)
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pp. 44-44
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