Study on MEMS Capacitive Differential Pressure Sensor
2014 ◽
Vol 609-610
◽
pp. 968-971
Keyword(s):
The design and fabrication of MEMS capacitive differential pressure sensor is reported. Silicon membrane is used as movable electrode. Gold metal film on glass is used as fixed electrode. Anodic bonding is used to bond together the silicon and glass to form the capacitive pressure sensor. The measurement capacitance of the sensors is 5.37 pF at an applied pressure of 0 kPa and 7.26 pF and the full operating range of 40 kPa.The ratio of changed to initial capacitance was 0.35. The error of the MEMS capacitive pressure sensor is less than 4‰ full-scale(FS) by using quadratic curve fitting which can meet most application requirements.
2021 ◽
pp. 014233122110080
Keyword(s):
1993 ◽
Vol 36
(3)
◽
pp. 183-185
◽
2021 ◽
2017 ◽
Vol 24
(1)
◽
pp. 51-56
Keyword(s):
2008 ◽
Vol 28
(4)
◽
pp. 21-26
Keyword(s):
2019 ◽
Vol 155
◽
pp. 461-469
◽
Keyword(s):