Features of Difference Scheme for the Diffusion-Kinetic Problem of Ion Implantation with Intermetallic Phases Formation
Keyword(s):
The implicit difference scheme has been suggested for the solution of diffusion-kinetic problem describing the ion implantation by intermetallic phase formation. The model corresponds to irreversible conditions and includes finite relaxation times for mass fluxes. The linear difference equations are solved by double-sweep method. The result illustrates the convergence of difference scheme at variation of its parameters. Qualitative picture of phase evolution in the surface layer is obtained different for problem with finite relaxation times and for zero relaxation times.
Keyword(s):
2001 ◽
Vol 194-199
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pp. 499-504
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1996 ◽
Vol 83
(1-3)
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pp. 60-64
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2017 ◽
Vol 56
(2)
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pp. 025601
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Keyword(s):
2013 ◽
Vol 23
(12)
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pp. 3553-3560
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