Effect of Aluminum Content on the Performance of Coatings Based on Al-Si-N
Keyword(s):
X Ray
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The transparent coatings on the basis of Al- Si- N system with high Al content and the opaque Al-Si-N with a low Al content were prepared by impulse magnetron sputtering method. Structural-phase state of the two types of coatings was examined by X-ray analysis. The microhardness was measured by nanoindentation method. The microhardness, the elastic modulus and the coefficient of elastic recovery were determined. Also the optical transmission was measured for all types of samples.
2016 ◽
Vol 683
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pp. 262-268
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2015 ◽
Vol 1085
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pp. 289-293
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2015 ◽
Vol 1085
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pp. 303-306
Keyword(s):
2017 ◽
Vol 906
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pp. 32-37
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2020 ◽
Vol 939
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pp. 012068
Keyword(s):