Recovery of Silicon and Silicon Carbide Powder from Waste Silicon Wafer Sludge

2013 ◽  
Vol 761 ◽  
pp. 65-68 ◽  
Author(s):  
Woo Teck Kwon ◽  
Soo Ryong Kim ◽  
Y. Kim ◽  
Jee Ban Poudel ◽  
Sea Cheon Oh

In an environmental and economic point of view, recycling of silicon wafer sludge is important. The aim of this work is to investigate the recycling method of silicon wafer sludge. Therefore, drying rate of silicon wafer sludge has been studied for separation of liquid and solid from sludge. Silicon and silicon carbide powder obtained from silicon wafer sludge were analyzed by SEM, XFR, XRD and particle size analyzer. The recovered oil was also characterized using GC-MS. From this work, it can be seen that the falling drying rate of silicon wafer sludge is linear equation. Various metal components have been found in recovered solid powder caused by wire sawing processing.

1996 ◽  
Vol 11 (7) ◽  
pp. 1601-1604 ◽  
Author(s):  
Mamoru Mitomo ◽  
Young-Wook Kim ◽  
Hideki Hirotsuru

Ultrafine silicon carbide powder with an average particle size of 90 nm was densified by hot-processing with the addition of Al2O3, Y2O3, and CaO at 1750 °C. Silicon carbide nanoceramics with an average grain size of 110 nm were prepared by liquid phase sintering at low temperature. The materials showed superplastic deformation at a strain rate of 5.0 × 10-4/s at 1700 °C, which is the lowest temperature published. The microstructure and deformation behavior of materials from a submicrometer powder were also investigated as a reference.


2012 ◽  
Vol 724 ◽  
pp. 49-52 ◽  
Author(s):  
Woo Teck Kwon ◽  
Soo Ryong Kim ◽  
Y. Kim ◽  
Yoon Joo Lee ◽  
Eun Jin Jung ◽  
...  

β-SiC powder was synthesized directly from silicon sludge with carbon black. Large amount of silicon sludge is generated from Solar Cell industry. In an environmental and economic point of view, recycling silicon sludge is important. In this study, two kinds of silicon sludge were characterized using XRD, SEM/EDS and FT-IR. SiC powder was synthesized by the reaction of ball-milled silicon powder for 3h in vacuum at different temperatures (1350 and 1600). Physical properties of the heat treated SiC have been characterized using a SEM, XRD, Particle size analyzer and FT-IR Spectroscopy.


1995 ◽  
Vol 410 ◽  
Author(s):  
D. G. Keil ◽  
H. F. Calcote ◽  
R. J Gill

ABSTRACTSelf-propagating flames in pure silane-acetylene mixtures produce silicon carbide (SiC) powder and hydrogen as main products. Through precise control of the stoichiometry of the reactant gas mixture, it has been possible to produce white SiC at high yields. Characterization of such powders by TEM has shown that the nascent powder consists of polycrystalline hexagonal plates with a narrow size distribution (40 ± 7 nm diameter). Infrared spectroscopy of powders indicate microcrystalline SiC and little bound hydrogen. Chemical analysis by the ANSI method showed the powder to be >96 wt % SiC with an impurity of silica (3.9 weight %) due to air exposure of the powder. Traces (0.1 to 0.2 weight %) of both free carbon and free silicon were found. Metal impurities detected by SIMS were typically low: less than 10 ppba for aluminum, sodium, titanium and vanadium. Boron was observed at 10 ppma. Like the oxygen, the boron impurities are probably associated with exposure of the powders to the atmosphere.


Author(s):  
Ahsan Ali Khan ◽  
Nurul Nasuha Binti Mohamad Royani ◽  
Muataz Hazza Faizi Al-Hazza ◽  
Mohd Radzi Haji Che Daud ◽  
AKM Mohiuddin

2014 ◽  
Vol 267 ◽  
pp. 273-278 ◽  
Author(s):  
Thakur Sudesh Kumar Raunija ◽  
Mariamma Mathew ◽  
Sharad Chandra Sharma

2006 ◽  
Vol 169 (2) ◽  
pp. 84-88 ◽  
Author(s):  
Maria Aparecida P. dos Santos ◽  
Célio A. Costa

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