Characterization and Removal of Metallic Contamination in H2O and H2O2 Using Single Particle Inductively Coupled Plasma Mass Spectrometry

2021 ◽  
Vol 314 ◽  
pp. 9-16
Author(s):  
Siddarth Sampath ◽  
Kusum Maharjan ◽  
Anthony Ozzello ◽  
Ashutosh Bhabhe
Keyword(s):  
Single Particle ◽  
Inductively Coupled Plasma ◽  
Deionized Water ◽  
Lower Grade ◽  
High Purity Grade ◽  
Inductively Coupled ◽  
Icp Ms ◽  
The Impact ◽  
Metallic Contamination

Metallic contamination is a major challenge in multiple semiconductor processes, including photolithography and wet etch and cleans (WEC). Though there are several contributors to metallic contamination, significant efforts have focused on improving the incoming quality of process chemicals, especially commodity chemicals. Another key contributor to on-wafer metallic contamination is water (H2O), which is used to dilute most aqueous chemicals. Single Particle Inductively Coupled Plasma Mass Spectroscopy (SP-ICP-MS), a technique relying on time-based resolution of pulses generated during a standard ICP-MS analysis, is used to aid the understanding of metal particle contamination in water and process chemicals.In this paper, we studied water and 30% Hydrogen Peroxide (H2O2), two of the most widely used chemicals across all WEC processes. We used a high purity grade of 30% H2O2, further diluted to a typical use concentration (5% by volume) using two grades of Deionized Water (unfiltered and filtered) where the concentration of metallic particles was the key variable. The metals studied included Iron (Fe), Chromium (Cr), Zinc (Zn), Titanium (Ti), Nickel (Ni) and Aluminum (Al), representing some of the most commonly observed metallic contaminants in H2O2 and water. After analyzing the distribution of contaminants in the chemicals, filters were introduced into the system to observe the impact of filtration on metal removal. The importance of filtration on the overall quality of the diluted process chemical was demonstrated by using a Polysulfone (PS) membrane to filter the lower grade Deionized Water (DIW).

scholarly journals Nutritional Evaluation and Risk Assessment of the Exposure to Essential and Toxic Elements in Dogs and Cats through the Consumption of Pelleted Dry Food: How Important Is the Quality of the Feed?

Toxics ◽  
2021 ◽  
Vol 9 (6) ◽  
pp. 133
Author(s):  
Ana Macías-Montes ◽  
Manuel Zumbado ◽  
Octavio P. Luzardo ◽  
Ángel Rodríguez-Hernández ◽  
Andrea Acosta-Dacal ◽  
...  
Keyword(s):  
Risk Assessment ◽  
Inductively Coupled Plasma ◽  
Reference Value ◽  
Inorganic Elements ◽  
Inductively Coupled ◽  
Icp Ms ◽  
Plasma Mass Spectrometry ◽  
Dry Food ◽  
Hazard Indexes

Dry feed for pets lacks specific legislation regarding maximum residue limits for inorganic elements. The aim of the present study was to determine the content of 43 inorganic elements in dog and cat feed, studying whether there were differences according to the supposed quality of the food and performing the risk assessment for health. Thirty-one and thirty packages of pelleted dry food for cats and dogs, respectively, were analyzed. After acidic microwave-assisted digestion, elements were detected and quantified by Inductively Coupled Plasma-Mass Spectrometry (ICP-MS). In general, we did not observe important differences in the content of elements according to the supposed quality of the brand. Among trace elements, selenium and manganese are above the dietary reference value. Arsenic and mercury showed the highest acute hazard indexes, which make them risk factors for the health of dogs and cats. Aluminum, uranium, antimony and vanadium contents were above the toxic reference value and showed the highest acute hazard indexes. It is necessary to improve the legislation regarding the food safety of pets, for their health and to protect the rights of consumers.

Number of spikes in single particle ICP-MS time scans: from the very dilute to the highly concentrated range

2021 ◽  
Author(s):  
Pierre-Emmanuel Peyneau ◽  
Martin Guillon
Keyword(s):  
Single Particle ◽  
Inductively Coupled Plasma ◽  
Particle Number ◽  
Number Concentration ◽  
Particle Number Concentration ◽  
Inductively Coupled ◽  
Nanoparticle Dispersions ◽  
Icp Ms ◽  
Plasma Mass Spectrometry ◽  
The Difference

The particle number concentration (PNC) of dilute nanoparticle dispersions can be determined by single particle inductively coupled plasma-mass spectrometry (sp-ICP-MS). Virtually equal to zero for very dilute dispersions, the difference...

Single particle ICP-MS-based absolute and relative quantification ofE. coliO157 16S rRNA using sandwich hybridization capture

The Analyst ◽  
2019 ◽  
Vol 144 (5) ◽  
pp. 1725-1730 ◽  
Author(s):  
Xiaomin Xu ◽  
Jiyun Chen ◽  
Bangrui Li ◽  
Lijuan Tang ◽  
Jianhui Jiang
Keyword(s):  
16S Rrna ◽  
Single Molecule ◽  
Single Particle ◽  
Inductively Coupled Plasma ◽  
Inductively Coupled ◽  
Hybridization Capture ◽  
Sandwich Hybridization ◽  
Icp Ms ◽  
Magnetic Capture ◽  
Plasma Mass Spectrometry

Herein, a novel 16S rRNA detection platform was achieved by combining a sandwich hybridization reaction, a single-molecule magnetic capture, and single particle-inductively coupled plasma mass spectrometry amplification.

scholarly journals Measurement of CeO2 Nanoparticles in Natural Waters Using a High Sensitivity, Single Particle ICP-MS

Molecules ◽  
2020 ◽  
Vol 25 (23) ◽  
pp. 5516
Author(s):  
Ibrahim Jreije ◽  
Agil Azimzada ◽  
Madjid Hadioui ◽  
Kevin J. Wilkinson
Keyword(s):  
Single Particle ◽  
Inductively Coupled Plasma ◽  
Natural Waters ◽  
High Sensitivity ◽  
Au Nps ◽  
Inductively Coupled ◽  
Icp Ms ◽  
Mean Diameter ◽  
Plasma Mass Spectrometry ◽  
St Lawrence River

As the production and use of cerium oxide nanoparticles (CeO2 NPs) increases, so does the concern of the scientific community over their release into the environment. Single particle inductively coupled plasma mass spectrometry is emerging as one of the best techniques for NP detection and quantification; however, it is often limited by high size detection limits (SDL). To that end, a high sensitivity sector field ICP-MS (SF-ICP-MS) with microsecond dwell times (50 µs) was used to lower the SDL of CeO2 NPs to below 4.0 nm. Ag and Au NPs were also analyzed for reference. SF-ICP-MS was then used to detect CeO2 NPs in a Montreal rainwater at a concentration of (2.2 ± 0.1) × 108 L−1 with a mean diameter of 10.8 ± 0.2 nm; and in a St. Lawrence River water at a concentration of ((1.6 ± 0.3) × 109 L−1) with a higher mean diameter (21.9 ± 0.8 nm). SF-ICP-MS and single particle time of flight ICP-MS on Ce and La indicated that 36% of the Ce-containing NPs detected in Montreal rainwater were engineered Ce NPs.

Joint forces of direct, single particle, CE– and HPLC–inductively coupled plasma mass spectrometry techniques for the examination of gold nanoparticle accumulation, distribution and changes inside human cells

Metallomics ◽  
2020 ◽  
Vol 12 (3) ◽  
pp. 408-415 ◽  
Author(s):  
Joanna Kruszewska ◽  
Dominika Kulpińska ◽  
Ilona Grabowska-Jadach ◽  
Magdalena Matczuk
Keyword(s):  
Mass Spectrometry ◽  
Gold Nanoparticle ◽  
Single Particle ◽  
Inductively Coupled Plasma ◽  
Human Cells ◽  
Inductively Coupled ◽  
Joint Forces ◽  
Icp Ms ◽  
Plasma Mass Spectrometry

ICP-MS-based platform for the characterization of medicinally attractive nanomaterials processing inside human cells.

U-Pb geochronology of apatite crystallized within a terrestrial impact melt sheet: Manicouagan as a geochronometer test site

2021 ◽  
Author(s):  
Maree McGregor ◽  
Christopher R.M. McFarlane ◽  
John G. Spray
Keyword(s):  
Inductively Coupled Plasma ◽  
Test Site ◽  
Apatite Crystal ◽  
Impact Event ◽  
Impact Melt ◽  
Inductively Coupled ◽  
Icp Ms ◽  
Average Formation ◽  
Plasma Mass Spectrometry ◽  
The Impact

ABSTRACT The Manicouagan impact event has been the subject of multiple age determinations over the past ~50 yr, providing an ideal test site for evaluating the viability of different geochronometers. This study highlights the suitability of Manicouagan’s essentially pristine impact melt body as a medium for providing insight into the U-Pb isotope systematics of geochronometers in the absence of shock-related overprinting. We performed in situ laser-ablation–inductively coupled plasma–mass spectrometry (LA-ICP-MS) U-Pb geochronology on apatite and zircon, both of which crystallized as primary phases. This study is the first application of U-Pb geochronology to apatite crystallized within a terrestrial impact melt sheet. U-Pb analyses were obtained from 200 melt-grown apatite grains (n = 222 spots), with a data subset providing a lower-intercept age of 212.5 ± 8.0 Ma. For melt-grown zircon, a total of 30 analyses from 28 grains were obtained, with a subset of the data yielding a lower-intercept age of ± 1.6 Ma. The lower precision (±8.0 Ma; ±3%) obtained from apatite is a consequence of low U and a high and variable common-Pb composition. This resulted from localized Pb*/PbC heterogeneity within the impact melt sheet that was incorporated into the apatite crystal structure during crystallization (where Pb*/PbC is the ratio of radiogenic Pb to common Pb). While considered a limitation to the precision obtainable from melt-grown apatite, its ability to record local-scale isotopic variations highlights an advantage of U-Pb studies on melt-grown apatite. The best-estimate ages from zircon and apatite overlap within error and correlate with previously determined ages for the Manicouagan impact event. An average formation age from the new determinations, combined with previous age constraints, yields a weighted mean age of 214.96 ± 0.30 Ma for the Manicouagan impact structure.

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