Excimer Laser Crystallized Poly-Si Thin-Film Transistors on a Plastic Substrate with Mobility of 250 cm2/V.s

2001 ◽  
Vol 80-81 ◽  
pp. 169-174 ◽  
Author(s):  
Dharam P. Gosain ◽  
A. Machida ◽  
S. Usui ◽  
Masao Arai
Keyword(s):  
Thin Film ◽  
Excimer Laser ◽  
Thin Film Transistors ◽  
Plastic Substrate ◽  
Si Thin Film

Application of Ion Doping and Excimer Laser Annealing to Fabrication of Low-Temperature Polycrystalline Si Thin-Film Transistors

1994 ◽  
Vol 33 (Part 1, No. 4A) ◽  
pp. 2092-2099 ◽  
Author(s):  
Genshiro Kawachi ◽  
Takashi Aoyama ◽  
Akio Mimura ◽  
Nobutake Konishi
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Excimer Laser ◽  
Thin Film Transistors ◽  
Laser Annealing ◽  
Excimer Laser Annealing ◽  
Ion Doping ◽  
Si Thin Film

Electrical Characteristics of Excimer-Laser-Annealed Poly-Si Thin-Film Transistors

2007 ◽  
Vol 51 (96) ◽  
pp. 241 ◽  
Author(s):  
Woo-Hyun LEE ◽  
Hyun-Mo KOO ◽  
Won-Ju CHO ◽  
Jongwan JUNG ◽  
Soon-Young OH ◽  
...  
Keyword(s):  
Thin Film ◽  
Excimer Laser ◽  
Thin Film Transistors ◽  
Electrical Characteristics ◽  
Si Thin Film

High-Performance Poly-Si Thin-Film Transistors with Excimer-Laser Annealed Silicon-Nitride Gate

1992 ◽  
Author(s):  
Kazuhiro Shimizu ◽  
Masayuki Higashimoto ◽  
Kyoutarou Nakamura ◽  
Osamu Sugiura ◽  
Masakiyo Matsumura
Keyword(s):  
Thin Film ◽  
Silicon Nitride ◽  
Excimer Laser ◽  
Thin Film Transistors ◽  
High Performance ◽  
Si Thin Film

Excimer laser processing fora-Si and poly-Si thin film transistors for imager applications

2000 ◽  
Vol 18 (4) ◽  
pp. 1823-1829 ◽  
Author(s):  
J. P. Lu ◽  
P. Mei ◽  
R. T. Fulks ◽  
J. Rahn ◽  
J. Ho ◽  
...  
Keyword(s):  
Thin Film ◽  
Excimer Laser ◽  
Laser Processing ◽  
Thin Film Transistors ◽  
Si Thin Film

High-Performance Poly-Si Thin Film Transistors Crystallized by Excimer Laser Irradiation with A-Si Spacer Structure

2005 ◽  
Vol 8 (1) ◽  
pp. G14 ◽  
Author(s):  
Ting-Kuo Chang ◽  
Ching-Wei Lin ◽  
Chun-Chien Tsai ◽  
Jian-Hao Lu ◽  
Bo-Ting Chen ◽  
...  
Keyword(s):  
Thin Film ◽  
Laser Irradiation ◽  
Excimer Laser ◽  
Thin Film Transistors ◽  
High Performance ◽  
Excimer Laser Irradiation ◽  
Si Thin Film
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