scholarly journals COMPARISON STUDY BETWEEN SPECTROSCOPIC ANALYSIS FOR (ZN,SN) PLASMA BY LIBS

2021 ◽  
Vol 03 (02) ◽  
pp. 52-61
Author(s):  
Hadeel K. NASIF ◽  
Kadhim A. AADIM ◽  
Baida M. AHMED

this article a spectroscopic research on laser-produced Tin and Zinc plasmas using the optical emission spectroscopy (OES) technique. Plasmas can be produced from a solid tin and zinc targets irradiated with a pulsed laser in room environments. The spectrum is recorded for the Sn, Zn laser plasma Nd: YAG with a wavelength of (1064) nm, a duration of (9) ns, and a frequency of (6) Hz and a focal length of (10) cm within the energy range (300-800)mj. By using the ratio line strength formula, the electron temperature (Te) can be calculated and the result is for Zinc (Zn) plasma (2.11 ev) and tin (Sn) plasma (1,227 ev). The Saha-Boltzmann equation will be used to calculate electron density (ne) in this method and the values for zinc (Zn) (3.3 cm-3)and tin (Sn) (2.1 cm-3). The plasma parameters, such as plasma (fp), Debye duration (λD), and Debye number (ND), were calculated in the proposed document.

Coatings ◽  
2021 ◽  
Vol 11 (10) ◽  
pp. 1221
Author(s):  
Jun-Hyoung Park ◽  
Ji-Ho Cho ◽  
Jung-Sik Yoon ◽  
Jung-Ho Song

We present a non-invasive approach for monitoring plasma parameters such as the electron temperature and density inside a radio-frequency (RF) plasma nitridation device using optical emission spectroscopy (OES) in conjunction with multivariate data analysis. Instead of relying on a theoretical model of the plasma emission to extract plasma parameters from the OES, an empirical correlation was established on the basis of simultaneous OES and other diagnostics. Additionally, we developed a machine learning (ML)-based virtual metrology model for real-time Te and ne monitoring in plasma nitridation processes using an in situ OES sensor. The results showed that the prediction accuracy of electron density was 97% and that of electron temperature was 90%. This method is especially useful in plasma processing because it provides in-situ and real-time analysis without disturbing the plasma or interfering with the process.


Vacuum ◽  
2013 ◽  
Vol 90 ◽  
pp. 151-154 ◽  
Author(s):  
Chen Hon Nee ◽  
Seong Shan Yap ◽  
Wee Ong Siew ◽  
Turid Worren Reenaas ◽  
Teck Yong Tou

2013 ◽  
Vol 770 ◽  
pp. 245-248 ◽  
Author(s):  
Kanchaya Honglertkongsakul

Argon plasma jet in a single-electrode configuration was generated at low temperature and atmospheric pressure by 50 kHz radiofrequency power supply. Optical Emission Spectroscopy (OES) was used to investigate the local emissivity of argon plasma in the range between 200 and 1,100 nm. The spatial distribution of reactive species was measured at different distances of the plasma expansion from the nozzle exit such as 0.0, 0.5, 1.0, 1.5, 2.0, 2.5 and 3.0 cm. These measurements were obtained to analyze the plasma parameters such as electron temperature and electron density. The effect of distances of the plasma expansion from the nozzle exit on the plasma parameters was studied. The main intensive argon lines were found in the region between 690 and 970 nm. The electron temperature was found in the range of 0.5-1.1 eV. The electron density was found in the range of 4.0x1012-1.2x1013 cm-3. The plasma parameters strongly depended on the distances of the plasma expansion from the nozzle exit.


2020 ◽  
pp. 1665-1671
Author(s):  
Madyan A. Khalaf ◽  
Baida M. Ahmed ◽  
Kadhim A. Aadim

In this work, the optical emission spectrum technique was used to analyze the spectrum resulting from the CdO:Sn plasma produced by laser Nd:YAG with a wavelength of (1064) nm, duration of (9) ns, and a focal length of (10) cm in the range of energy of 500-800 mJ. The electron temperature (Te) was calculated using the in ratio line intensities method, while the electron density (ne) was calculated using Saha-Boltzmann equation. Also, other plasma parameters were calculated, such as plasma (fp), Debye length (λD) and Debye number (ND). At mixing ratios of X=0.1, 0.3 and 0.5, the CdO1-X :SnX plasma spectrum was recorded for different energies. The changes in electron temperature and the densities were studied as a function of the laser energies. Outcome measure value of the electron temperature at the ratio of  X = 0.1 was (1.079-1.054) eV, while at  X=0.3 the Te range was (0.952- 0.921) eV and at X=0.5 it was (0.928-0.906) eV.


1996 ◽  
Vol 11 (6) ◽  
pp. 1514-1519 ◽  
Author(s):  
R. Dat ◽  
O. Auciello ◽  
D. J. Lichtenwalner ◽  
A. I. Kingon

La0.5Sr0.5CoO3 (LSCO) thin films have been deposited on (100) MgO substrates using pulsed laser ablation-deposition (PLAD). The crystallographic orientation of LSCO was found to be dependent on the surface treatment of (100) MgO prior to deposition. PLAD deposition parameters were optimized to yield LSCO films with an RMS surface roughness of 40–50 Å. A smooth surface morphology was reproduced as long as the oxygen content of the LSCO target was preserved. Otherwise, “splashing” occurred which resulted in the transfer of condensed particles from molten spherical globules of LSCO from the target to the substrate. Splashing was subsequently eliminated and smooth surface quality was restored after annealing the LSCO target at 550 °C in oxygen for 3 h. Optical emission spectroscopy (OES) of the LSCO's plume identified excited atomic cobalt neutrals, excited singly ionized strontium and lanthanum, and excited molecular LaO species. Oxygen interaction with the plume produced no new species. Furthermore, the OES data suggest that the observed LaO molecules were not created by the chemical reaction between La and O2 during ablation, but were ejected directly from the target during the PLAD process.


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