Reaction of Tri-methylaluminum on Si (001) Surface for Initial Aluminum Oxide Thin-Film Growth
2010 ◽
Vol 31
(12)
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pp. 3579-3582
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2010 ◽
Vol 16
(47)
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pp. 13925-13929
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2001 ◽
Vol 114-116
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pp. 575-580
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2001 ◽
Vol 175-176
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pp. 709-714
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Keyword(s):
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2014 ◽
Vol 254
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pp. 291-297
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Keyword(s):
2008 ◽
Vol 20
(26)
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pp. 264008
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2013 ◽
Vol 31
(1)
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pp. 01A106
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Keyword(s):