scholarly journals Study of the influence of diamond-like carbon film deposition technology on the change of its physical and mechanical characteristics

2021 ◽  
pp. 58-62
Author(s):  
Artem Runts ◽  
Sergei Ruchin ◽  
Yurii Zhidik ◽  
Alena Yurjeva ◽  
Mariya Polosukhina
Keyword(s):  
Mechanical Characteristics ◽  
Carbon Film ◽  
Deposition Process ◽  
Carbon Films ◽  
Film Deposition ◽  
Diamond Like Carbon ◽  
Technological Parameters ◽  
Steel Substrates ◽  
Deposition Technology ◽  
Physical And Mechanical Characteristics

The paper presents the results of testing the technology of deposition of diamond-like carbon films on the surface of stainless steel substrates at different process parameters, a quantitative assessment of the sp3 bond content and the physical and mechanical characteristics of the coatings obtained, a conclusion about the influence of the deposition process technological parameters on these characteristics is formulated.

Comparison of diamond-like carbon film deposition by electron cyclotron resonance with benzene and methane

1996 ◽  
Vol 11 (1) ◽  
pp. 221-228 ◽  
Author(s):  
P. S. Andry ◽  
P. W. Pastel ◽  
W. J. Varhue
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Energy Gap ◽  
Carbon Film ◽  
Carbon Films ◽  
Electron Cyclotron ◽  
Film Deposition ◽  
Index Of Refraction ◽  
Diamond Like Carbon ◽  
Plasma Stream

A comparative study of the deposition of diamond-like carbon films using methane or benzene in a microwave electron cyclotron resonance plasma-enhanced chemical vapor deposition system has been performed. Process variables studied were reactor pressure, applied radio frequency substrate bias, and microwave power. The plasma stream was characterized using optical emission spectroscopy and mass spectrometry. Film properties studied included optical energy gap, total hydrogen content, integrated C-H stretch absorption, index of refraction, and Raman spectra. The use of a high C/H ratio reactant such as benzene was found to be advantageous over methane in that higher deposition rates were possible and the resultant films exhibit diamond-like properties without the application of large substrate biases. Another result of this investigation was further confirmation that hard carbon films contain a significant quantity of nonbonded hydrogen [A. Grill and V. Patel, Appl. Phys. Lett. 60 (17), 2089 (1992)].

Carbon Film Deposition On Silicon Using Low Energy Ion Beams

1991 ◽  
Vol 223 ◽  
Author(s):  
Qin Fuguang ◽  
Yao Zhenyu ◽  
Ren Zhizhang ◽  
S.-T. Lee ◽  
I. Bello ◽  
...  
Keyword(s):  
Photoelectron Spectroscopy ◽  
Ion Beam ◽  
Carbon Film ◽  
Carbon Films ◽  
Film Deposition ◽  
Ion Energy ◽  
Transmission Electron ◽  
Higher Temperature ◽  
Post Implantation ◽  
Beam Deposition

ABSTRACTDirect ion beam deposition of carbon films on silicon in the ion energy range of 15–500eV and temperature range of 25–800°C has been studied using mass selected C+ ions under ultrahigh vacuum. The films were characterized with X-ray photoelectron spectroscopy, Raman spectroscopy, and transmission electron microscopy and diffraction analysis. Films deposited at room temperature consist mainly of amorphous carbon. Deposition at a higher temperature, or post-implantation annealing leads to formation of microcrystalline graphite. A deposition temperature above 800°C favors the formation of microcrystalline graphite with a preferred orientation in the (0001) direction. No evidence of diamond formation was observed in these films.

Enhancing the adhesion of diamond-like carbon films to steel substrates using silicon-containing interlayers

2018 ◽  
Vol 350 ◽  
pp. 74-83 ◽  
Author(s):  
Soraya Delfani-Abbariki ◽  
Amir Abdollah-zadeh ◽  
Seyed Mohammad Mehdi Hadavi ◽  
Mohammad Abedi ◽  
Seyed Mohammad Reza Derakhshandeh
Keyword(s):  
Carbon Films ◽  
Diamond Like Carbon ◽  
Steel Substrates

Hybrid plasma system for diamond-like carbon film deposition

2000 ◽  
Vol 131 (1-3) ◽  
pp. 20-25 ◽  
Author(s):  
D Korzec ◽  
G Fedosenko ◽  
A Georg ◽  
J Engemann
Keyword(s):  
Carbon Film ◽  
Film Deposition ◽  
Diamond Like Carbon ◽  
Plasma System ◽  
Diamond Like Carbon Film ◽  
Hybrid Plasma

scholarly journals Friction and wear performance of ion-beam-deposited diamond-like carbon films on steel substrates

1994 ◽  
Vol 3 (1-2) ◽  
pp. 119-125 ◽  
Author(s):  
A. Erdemir ◽  
F.A. Nichols ◽  
X.Z. Pan ◽  
R. Wei ◽  
P. Wilbur
Keyword(s):  
Friction And Wear ◽  
Ion Beam ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Wear Performance ◽  
Steel Substrates

The Biocompatibility of Ti Alloy Improved by Nitrogen-Doped Diamond-Like Carbon Films

2014 ◽  
Vol 711 ◽  
pp. 250-254 ◽  
Author(s):  
Wufanbieke Baheti ◽  
Ming Xin Li ◽  
Fu Guo Wang ◽  
Jin Ge Song ◽  
Long Hua Xu ◽  
...  
Keyword(s):  
Contact Angle ◽  
Photoelectron Spectroscopy ◽  
Carbon Film ◽  
Chemical Vapor ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Measuring Device ◽  
Nitrogen Doped ◽  
Angle Measuring ◽  
N Doping

The nitrogen-doped diamond-like carbon film was prepared on Ti6Al4V alloy by using plasma enhanced chemical vapor deposition (PECVD) technique,and its biocompatibility was studied.The surface morphology,chemical composition and contact angle were measured by scanning electron microscope (SEM),X-ray photoelectron spectroscopy(XPS),Raman Spectrometer and contact angle measuring device. Finally, the proliferation rate and cellular morphology of 3T3-E1 osteoblast cells on different sample surfaces were tested and Image J software was used to statistically analyze the count of the adhered cells. The results showed that cell adhesion and proliferation were significantly (P<0.05) increased on nitrogen-doped diamond-like carbon films , which illustrated that N doping improved the biocompatibility of DLC films. This finding has potential clinical application value to modify titanium alloy for new bone formation.

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