Diamond-like carbon film deposition on plasma nitrided steel substrates

1994 ◽  
Vol 3 (8) ◽  
pp. 1112-1116 ◽  
Author(s):  
F. Cellier ◽  
J.F. Nowak
Keyword(s):  
Carbon Film ◽  
Film Deposition ◽  
Diamond Like Carbon ◽  
Nitrided Steel ◽  
Diamond Like Carbon Film ◽  
Steel Substrates

Hybrid plasma system for diamond-like carbon film deposition

2000 ◽  
Vol 131 (1-3) ◽  
pp. 20-25 ◽  
Author(s):  
D Korzec ◽  
G Fedosenko ◽  
A Georg ◽  
J Engemann
Keyword(s):  
Carbon Film ◽  
Film Deposition ◽  
Diamond Like Carbon ◽  
Plasma System ◽  
Diamond Like Carbon Film ◽  
Hybrid Plasma

scholarly journals Study of the influence of diamond-like carbon film deposition technology on the change of its physical and mechanical characteristics

2021 ◽  
pp. 58-62
Author(s):  
Artem Runts ◽  
Sergei Ruchin ◽  
Yurii Zhidik ◽  
Alena Yurjeva ◽  
Mariya Polosukhina
Keyword(s):  
Mechanical Characteristics ◽  
Carbon Film ◽  
Deposition Process ◽  
Carbon Films ◽  
Film Deposition ◽  
Diamond Like Carbon ◽  
Technological Parameters ◽  
Steel Substrates ◽  
Deposition Technology ◽  
Physical And Mechanical Characteristics

The paper presents the results of testing the technology of deposition of diamond-like carbon films on the surface of stainless steel substrates at different process parameters, a quantitative assessment of the sp3 bond content and the physical and mechanical characteristics of the coatings obtained, a conclusion about the influence of the deposition process technological parameters on these characteristics is formulated.

Substrate bias effects during diamond like carbon film deposition by microwave ECR plasma CVD

2008 ◽  
Vol 8 (1) ◽  
pp. 6-12 ◽  
Author(s):  
R.M. Dey ◽  
S.B. Singh ◽  
A. Biswas ◽  
R.B. Tokas ◽  
N. Chand ◽  
...  
Keyword(s):  
Carbon Film ◽  
Film Deposition ◽  
Diamond Like Carbon ◽  
Substrate Bias ◽  
Plasma Cvd ◽  
Ecr Plasma ◽  
Diamond Like Carbon Film
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