Electron-beam Deposition of Ceramic Coatings

2020 ◽  
Vol 4 (2) ◽  
pp. AMP1401453-AMP1401453
Author(s):  
E.M. Oks
Keyword(s):  
Electron Beam ◽  
Ceramic Coatings ◽  
Electron Beam Deposition ◽  
Beam Deposition

scholarly journals Electron beam deposition of ceramic coatings at fore-vacuum pressure

2016 ◽  
Author(s):  
Andrey Tyunkov ◽  
Yury Yushkov ◽  
Denis Zolotukhin ◽  
Efim Oks
Keyword(s):  
Electron Beam ◽  
Ceramic Coatings ◽  
Vacuum Pressure ◽  
Electron Beam Deposition ◽  
Beam Deposition

scholarly journals Electron-beam deposition of thermoconducting ceramic coatings for microelectronic devices

2021 ◽  
Vol 2064 (1) ◽  
pp. 012072
Author(s):  
E M Oks’ ◽  
A V Tyunkov ◽  
Y G Yushkov ◽  
D B Zolotukhin
Keyword(s):  
Experimental Study ◽  
Electron Beam ◽  
Aluminum Oxide ◽  
Ceramic Coatings ◽  
Electron Beam Evaporation ◽  
Dielectric Parameters ◽  
Dielectric Coatings ◽  
Microelectronic Devices ◽  
Electron Beam Deposition ◽  
Beam Deposition

Abstract This paper presents the experimental study of dielectric coatings based on aluminum oxide (Al2O3) and aluminum nitride (AlN) ceramics as applied to their use in microelectronics. It is shown that the coatings obtained by electron-beam evaporation of ceramic in forevacuum pressures (1-100 Pa) endow devices with required dielectric parameters and improves heat sink from the surface of monolithic integral circuits.

Electron-beam deposition of heat-conducting ceramic coatings in the forevacuum pressure range

2020 ◽  
Vol 46 (13) ◽  
pp. 21190-21195
Author(s):  
Yu.G. Yushkov ◽  
E.M. Oks ◽  
A.V. Tyunkov ◽  
D.B. Zolotukhin ◽  
A. Yu. Yushenko ◽  
...  
Keyword(s):  
Electron Beam ◽  
Pressure Range ◽  
Ceramic Coatings ◽  
Heat Conducting ◽  
Electron Beam Deposition ◽  
Beam Deposition

Electron beam deposition of ZrO2ZnO films

1996 ◽  
Vol 290-291 ◽  
pp. 80-83 ◽  
Author(s):  
S.B. Qadri ◽  
E.F. Skelton ◽  
P. Lubitz ◽  
N.V. Nguyen ◽  
H.R. Khan
Keyword(s):  
Electron Beam ◽  
Zno Films ◽  
Electron Beam Deposition ◽  
Beam Deposition

scholarly journals Electron-beam deposition of metals for mask repair

2003 ◽  
Vol 9 (S02) ◽  
pp. 984-985
Author(s):  
Young Choi ◽  
David C Joy
Keyword(s):  
Electron Beam ◽  
Electron Beam Deposition ◽  
Beam Deposition

scholarly journals Optical characterization of photosensitive AMTIR-1 chalcogenide thin layers deposited by electron beam deposition

2016 ◽  
Vol 442 ◽  
pp. 22-28 ◽  
Author(s):  
Alexandre Joërg ◽  
Fabien Lemarchand ◽  
Mengxue Zhang ◽  
Michel Lequime ◽  
Julien Lumeau
Keyword(s):  
Electron Beam ◽  
Optical Characterization ◽  
Thin Layers ◽  
Electron Beam Deposition ◽  
Beam Deposition

Electron-beam deposition of vanadium dioxide thin films

2012 ◽  
Vol 111 (3) ◽  
pp. 975-981 ◽  
Author(s):  
R. E. Marvel ◽  
K. Appavoo ◽  
B. K. Choi ◽  
J. Nag ◽  
R. F. Haglund
Keyword(s):  
Thin Films ◽  
Electron Beam ◽  
Vanadium Dioxide ◽  
Electron Beam Deposition ◽  
Vanadium Dioxide Thin Films ◽  
Beam Deposition

Aging process of photosensitive chalcogenide films deposited by electron beam deposition

2011 ◽  
Vol 509 (27) ◽  
pp. 7330-7336 ◽  
Author(s):  
F. Charpentier ◽  
M. Dussauze ◽  
M. Cathelinaud ◽  
G. Delaizir ◽  
E.I. Kamitsos ◽  
...  
Keyword(s):  
Electron Beam ◽  
Aging Process ◽  
Chalcogenide Films ◽  
Electron Beam Deposition ◽  
Beam Deposition
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