High Sensitive Piezoresistive Cantilever MEMS Based Sensor by Introducing Stress Concentration Region (SCR)
2006 ◽
Vol 326-328
◽
pp. 1769-1772
2015 ◽
Vol 645-646
◽
pp. 555-560
2013 ◽
Vol 46
(50)
◽
pp. 505501
◽
1994 ◽
Vol 57
(2)
◽
pp. 201-206
◽
2012 ◽
Vol 594-597
◽
pp. 773-778
◽
2015 ◽
Vol 1092-1093
◽
pp. 1366-1370
◽
2012 ◽
Vol 490-495
◽
pp. 2165-2168
◽
2016 ◽
Vol 2016
(0)
◽
pp. OS11-24