In this paper, a simulation model is proposed to describe CH4 adsorption-induced curvature of a nanocantilever, based on the energy transfer between potential energy of adsorbates and elastic energy of the bending cantilever. For most cantilever sensors, the basic structure is a silicon beam coated with a metal layer on the top, and aluminum is chosen here. Because the native oxide is usually formed during the fabrication of silicon beams, we have to describe the effect of native oxide on the elastic modulus of the silicon nanobeam in this model based on the semi-continuum method. This model gives a way to predict the curvature of the composite cantilever with native oxide when adsorbing a single layer of CH4 molecules.
Polymer Dipoles Relaxation and Potential Energy (New Simulation Model)