scholarly journals Improvement in Sputtering Rate Uniformity over Large Deposition Area of Large-Scale Ion Beam Sputtering System

2021 ◽  
Author(s):  
Ryuji Maruyama ◽  
Dai Yamazaki ◽  
Kazuhiro Akutsu-Suyama ◽  
Takayasu Hanashima ◽  
Noboru Miyata ◽  
...  
Keyword(s):  
Large Scale ◽  
Ion Beam ◽  
Ion Beam Sputtering ◽  
Deposition Area ◽  
Beam Sputtering ◽  
Sputtering System

Development of neutron supermirror with large-scale ion-beam sputtering instrument

2006 ◽  
Vol 385-386 ◽  
pp. 1256-1258 ◽  
Author(s):  
R. Maruyama ◽  
D. Yamazaki ◽  
T. Ebisawa ◽  
M. Hino ◽  
K. Soyama
Keyword(s):  
Large Scale ◽  
Ion Beam ◽  
Ion Beam Sputtering ◽  
Beam Sputtering

Development of an ion-beam sputtering system for depositing thin films and multilayers of alloys and compounds

2003 ◽  
Vol 205 (1-4) ◽  
pp. 309-322 ◽  
Author(s):  
Mukul Gupta ◽  
Ajay Gupta ◽  
D.M Phase ◽  
S.M Chaudhari ◽  
B.A Dasannacharya
Keyword(s):  
Thin Films ◽  
Ion Beam ◽  
Ion Beam Sputtering ◽  
Beam Sputtering ◽  
Alloys And Compounds ◽  
Sputtering System

Deposition Characteristics of AlN Thin Film Prepared by the Dual Ion Beam Sputtering System

2006 ◽  
Vol 36 (1) ◽  
pp. 81-87 ◽  
Author(s):  
T. L. Hu ◽  
S. W. Mao ◽  
C. P. Chao ◽  
M. F. Wu ◽  
H. L. Huang ◽  
...  
Keyword(s):  
Thin Film ◽  
Ion Beam ◽  
Ion Beam Sputtering ◽  
Beam Sputtering ◽  
Dual Ion Beam Sputtering ◽  
Sputtering System

Mechanical properties of BCN films deposited by dual cesium ion beam sputtering system

2003 ◽  
Vol 169-170 ◽  
pp. 340-343 ◽  
Author(s):  
Eungsun Byon ◽  
Jong-Kuk Kim ◽  
Sunghun Lee ◽  
Jun-Hee Hah ◽  
Katsuhisa Sugimoto
Keyword(s):  
Mechanical Properties ◽  
Ion Beam ◽  
Ion Beam Sputtering ◽  
Cesium Ion ◽  
Beam Sputtering ◽  
Sputtering System
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