Effects of electron-beam irradiation on In–Ga–Zn–O thin films

2014 ◽  
Vol 53 (11) ◽  
pp. 115502 ◽  
Author(s):  
Takuya Hirohashi ◽  
Kenichi Okazaki ◽  
Shunpei Yamazaki
Keyword(s):  
Thin Films ◽  
Electron Beam ◽  
Electron Beam Irradiation ◽  
Beam Irradiation

Tuning the magnetism of epitaxial cobalt oxide thin films by electron beam irradiation

2017 ◽  
Vol 1 (2) ◽  
Author(s):  
Q. Q. Lan ◽  
X. J. Zhang ◽  
X. Shen ◽  
H. W. Yang ◽  
H. R. Zhang ◽  
...  
Keyword(s):  
Thin Films ◽  
Electron Beam ◽  
Cobalt Oxide ◽  
Electron Beam Irradiation ◽  
Beam Irradiation ◽  
Oxide Thin Films

Facile rearrangement of molecular layer deposited metalcone thin films by electron beam irradiation for area selective atomic layer deposition

2021 ◽  
Author(s):  
Seunghwan Lee ◽  
GeonHo Baek ◽  
Hye-mi Kim ◽  
Yong-Hwan Kim ◽  
Jin-Seong Park
Keyword(s):  
Thin Films ◽  
Electron Beam ◽  
Atomic Layer Deposition ◽  
Electron Beam Irradiation ◽  
Molecular Layer ◽  
Atomic Layer ◽  
Beam Irradiation ◽  
Selective Deposition ◽  
Layer Deposition ◽  
Amorphous Structures

Metalcone films can be rearranged from amorphous structures to 2D-like carbon by electron beam irradiation. The irradiated indicone (HQ) film can be used as an inhibitor for selective deposition delaying 20 cycles of ALD of ZnO.

Effect of high-energy electron beam irradiation on the properties of AZO thin films prepared by rf magnetron sputtering

2010 ◽  
Vol 518 (22) ◽  
pp. 6236-6240 ◽  
Author(s):  
Eui-Jung Yun ◽  
Jin Woo Jung ◽  
Kyung Nam Ko ◽  
Jongha Hwang ◽  
Byung Cheol Lee ◽  
...  
Keyword(s):  
Thin Films ◽  
Electron Beam ◽  
Magnetron Sputtering ◽  
Electron Beam Irradiation ◽  
Rf Magnetron Sputtering ◽  
High Energy ◽  
Energy Electron ◽  
High Energy Electron ◽  
Beam Irradiation

Rapid Crystallization of CuInSe2 Thin Films by Electron-Beam Irradiation

2018 ◽  
Vol 10 (5) ◽  
pp. 636-640
Author(s):  
Chae-Woong Kim ◽  
Hongsub Jee ◽  
Jae-Hyeong Lee ◽  
Jin Hyeok Kim ◽  
Chaehwan Jeong
Keyword(s):  
Thin Films ◽  
Electron Beam ◽  
Electron Beam Irradiation ◽  
Beam Irradiation ◽  
Rapid Crystallization

Growth of high-quality CuCl thin films by a technique involving electron-beam irradiation

2013 ◽  
Vol 378 ◽  
pp. 372-375 ◽  
Author(s):  
Masayoshi Ichimiya ◽  
Phuong Le Quang ◽  
Masaaki Ashida ◽  
Tadashi Itoh
Keyword(s):  
Thin Films ◽  
Electron Beam ◽  
Electron Beam Irradiation ◽  
Beam Irradiation ◽  
High Quality

scholarly journals Charging effects of SiO2 thin films under defocused electron beam irradiation

2012 ◽  
Vol 61 (2) ◽  
pp. 027302
Author(s):  
Li Wei-Qin ◽  
Zhang Hai-Bo ◽  
Lu Jun
Keyword(s):  
Thin Films ◽  
Electron Beam ◽  
Electron Beam Irradiation ◽  
Beam Irradiation
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