Facile rearrangement of molecular layer deposited metalcone thin films by electron beam irradiation for area selective atomic layer deposition
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Metalcone films can be rearranged from amorphous structures to 2D-like carbon by electron beam irradiation. The irradiated indicone (HQ) film can be used as an inhibitor for selective deposition delaying 20 cycles of ALD of ZnO.
2012 ◽
Vol 33
(9)
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pp. 093004
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2011 ◽
Vol 158
(1)
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pp. D1
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2014 ◽
Vol 40
(3)
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pp. 4383-4388
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2015 ◽
Vol 764-765
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pp. 138-142
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