Generation of ultra high-power thermal plasma jet and its application to crystallization of amorphous silicon films
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2021 ◽
Vol 121
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pp. 105357
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2018 ◽
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2013 ◽
Vol 52
(5S2)
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pp. 05EE02
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2018 ◽
Vol 57
(6S2)
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pp. 06JH01
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