Leading Wave Crystallization Induced by Micro-Thermal-Plasma-Jet Irradiation of Amorphous Silicon Films

2013 ◽  
Vol 52 (5S2) ◽  
pp. 05EE02 ◽  
Author(s):  
Shohei Hayashi ◽  
Yuji Fujita ◽  
Takahiro Kamikura ◽  
Kohei Sakaike ◽  
Muneki Akazawa ◽  
...  
Keyword(s):  
Amorphous Silicon ◽  
Thermal Plasma ◽  
Plasma Jet ◽  
Silicon Films ◽  
Thermal Plasma Jet

Generation of ultra high-power thermal plasma jet and its application to crystallization of amorphous silicon films

2017 ◽  
Vol 56 (6S2) ◽  
pp. 06HE05
Author(s):  
Ryosuke Nakashima ◽  
Ryota Shin ◽  
Hiroaki Hanafusa ◽  
Seiichiro Higashi
Keyword(s):  
Amorphous Silicon ◽  
High Power ◽  
Thermal Plasma ◽  
Plasma Jet ◽  
Silicon Films ◽  
Thermal Plasma Jet

Effect of Grain Growth Control by Atmospheric Micro-Thermal- Plasma-Jet Crystallization of Amorphous Silicon Strips on TFT Characteristics

2014 ◽  
Vol 64 (10) ◽  
pp. 23-29 ◽  
Author(s):  
S. Morisaki ◽  
S. Hayashi ◽  
S. Yamamoto ◽  
T. Nakatani ◽  
S. Higashi
Keyword(s):  
Amorphous Silicon ◽  
Grain Growth ◽  
Thermal Plasma ◽  
Growth Control ◽  
Plasma Jet ◽  
Thermal Plasma Jet
Sign in / Sign up

Export Citation Format

Share Document