Spectroscopic Ellipsometry for the Identification of Paracrystallites in the Ultra-Thin Thermal CVD Hydrogenated Amorphous Silicon Films

Silicon Films ◽

Thermal Cvd ◽

Optical Characterization of Very Thin Hydrogenated Amorphous Silicon Films Using Spectroscopic Ellipsometry

Japanese Journal of Applied Physics ◽

10.1143/jjap.30.l1914 ◽

1991 ◽

Vol 30 (Part 2, No. 11B) ◽

pp. L1914-L1916 ◽

Cited By ~ 1

Author(s):

Tadashi Saitoh ◽

Nobuyasu Hori ◽

Katsuyuki Suzuki ◽

Shigeo Iida

Keyword(s):

Amorphous Silicon ◽

Optical Characterization ◽

Silicon Films ◽

Spectroscopic Ellipsometry Studies on Ultrathin Hydrogenated Amorphous Silicon Films Prepared by Thermal Chemical Vapor Deposition

Japanese Journal of Applied Physics ◽

10.1143/jjap.39.6196 ◽

2000 ◽

Vol 39 (Part 1, No. 11) ◽

pp. 6196-6201 ◽

Cited By ~ 3

Author(s):

Sukti Hazra ◽

Mitsuyuki Yamanaka ◽

Isao Sakata ◽

Toshiyuki Tsutsumi ◽

Tatsuro Maeda ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Amorphous Silicon ◽

Vapor Deposition ◽

Chemical Vapor ◽

Silicon Films ◽

Thermal Chemical Vapor Deposition ◽

Characterization of pulsed laser deposited hydrogenated amorphous silicon films by spectroscopic ellipsometry

Thin Solid Films ◽

10.1016/j.tsf.2010.12.173 ◽

2011 ◽

Vol 519 (9) ◽

pp. 2855-2858 ◽

Cited By ~ 5

Author(s):

István Hanyecz ◽

Judit Budai ◽

Edit Szilágyi ◽

Zsolt Tóth

Keyword(s):

Amorphous Silicon ◽

Pulsed Laser ◽

Silicon Films ◽

Real time spectroscopic ellipsometry on ultrathin (<50Å) hydrogenated amorphous silicon films on Si(100) and GaAs(100)

Journal of Applied Physics ◽

10.1063/1.2749466 ◽

2007 ◽

Vol 101 (12) ◽

pp. 123529 ◽

Cited By ~ 11

Author(s):

P. J. van den Oever ◽

M. C. M. van de Sanden ◽

W. M. M. Kessels

Keyword(s):

Amorphous Silicon ◽

Real Time ◽

Silicon Films ◽

The influence of deposition temperature and annealing temperature on the optoelectronic properties of hydrogenated amorphous silicon films

Journal of Applied Physics ◽

10.1063/1.347444 ◽

1991 ◽

Vol 69 (12) ◽

pp. 8320-8328 ◽

Cited By ~ 22

Author(s):

M. Kunst ◽

H.‐C. Neitzert

Keyword(s):

Amorphous Silicon ◽

Deposition Temperature ◽

Annealing Temperature ◽

Optoelectronic Properties ◽

Silicon Films ◽

Drive‐level capacitance profiling: Its application to determining gap state densities in hydrogenated amorphous silicon films

Applied Physics Letters ◽

10.1063/1.96129 ◽

1985 ◽

Vol 47 (4) ◽

pp. 412-414 ◽

Cited By ~ 144

Author(s):

C. E. Michelson ◽

A. V. Gelatos ◽

J. D. Cohen

Keyword(s):

Amorphous Silicon ◽

Drive Level ◽

Silicon Films ◽

State Densities ◽

Hydrogenated Amorphous ◽

Gap State

Catalytic doping of phosphorus and boron atoms on hydrogenated amorphous silicon films

Japanese Journal of Applied Physics ◽

10.7567/jjap.55.04es05 ◽

2016 ◽

Vol 55 (4S) ◽

pp. 04ES05 ◽

Cited By ~ 11

Author(s):

Junichi Seto ◽

Keisuke Ohdaira ◽

Hideki Matsumura

Keyword(s):

Amorphous Silicon ◽

Silicon Films ◽

Hydrogenated Amorphous Silicon Films Prepared By rf Sputtering In He/H2

10.1117/12.938346 ◽

1986 ◽

Author(s):

M L. Albers ◽

H R. Shanks ◽

J Shinar

Keyword(s):

Amorphous Silicon ◽

Rf Sputtering ◽

Silicon Films ◽

Effects of silicon–hydrogen bond characteristics on the crystallization of hydrogenated amorphous silicon films prepared by plasma enhanced chemical vapor deposition

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.582049 ◽

1999 ◽

Vol 17 (6) ◽

pp. 3240-3245 ◽

Cited By ~ 21

Author(s):

Hae-Yeol Kim ◽

Jae-Beom Choi ◽

Jai-Young Lee

Keyword(s):

Hydrogen Bond ◽

Chemical Vapor Deposition ◽

Amorphous Silicon ◽

Vapor Deposition ◽

Chemical Vapor ◽

Silicon Films ◽

Hydrogenated Amorphous ◽

Bond Characteristics

Conductance fluctuations in undoped intrinsic hydrogenated amorphous silicon films prepared using several deposition techniques

Journal of Non-Crystalline Solids ◽

10.1016/s0022-3093(99)00840-6 ◽

2000 ◽

Vol 266-269 ◽

pp. 304-308 ◽

Cited By ~ 2

Author(s):

Mehmet Güneş ◽

Robert E Johanson ◽

S.O Kasap

Keyword(s):

Amorphous Silicon ◽

Silicon Films ◽

Conductance Fluctuations ◽

Hydrogenated Amorphous ◽

Deposition Techniques