The most important task of precision engineering at the present stage is the development of more efficient technological processes for manufacturing parts that ensure not only high accuracy at a minimum cost, but also the preservation of the original accuracy indicators throughout the entire service life of the product. (Research purpose) The research purpose is in studying the technological operation of stabilization of residual stresses of a round plate based on the method of relaxation of residual stresses by the influence of oscillatory movements of ultrasonic frequency. (Materials and methods) The article notes that the parts and components of the sensors are connected to each other, mainly by means of screws and other threaded connections; the abundance of springs (of return type), internal backlashes of mobile mechanisms, contributes to the occurrence of residual stresses (shrinkage, lapping), which affects the stability of the readings. Authors proposed a method and performed mathematical modeling of ultrasonic stabilization of the deformation of a round plate (elastic sensing element), having previously provided tension by the influence of an external load on its surface. Authors have found that this technology provides high performance and is not difficult to implement from a technical point of view. (Results and discussion) It was found by mathematical analysis that the processing time depends inversely on the vibration frequency of the plate, so processing the plate with an ultrasonic frequency significantly reduces the required processing time, increases its performance compared to traditional methods of training. (Сonclusions) With a small amplitude of these vibrations, the energy of a single oscillation cycle decreases, and this significantly reduces the amount of accumulated deformation, which improves the quality of processing.