scholarly journals Structural, Morphological, Vibrational and Optical Properties of GaN Films Grown by Reactive Sputtering: The Effect of RF Power at Low Working Pressure Limit

2022 ◽  
Vol 25 ◽  
Author(s):  
R. S. de Oliveira ◽  
H. A. Folli ◽  
C. Stegemann ◽  
I. M. Horta ◽  
B. S. Damasceno ◽  
...  
Keyword(s):  
Optical Properties ◽  
Reactive Sputtering ◽  
Rf Power ◽  
Working Pressure ◽  
Pressure Limit

Change of the critical thickness in the preferred orientation of TiN films

1995 ◽  
Vol 10 (3) ◽  
pp. 634-639 ◽  
Author(s):  
U.C. Oh ◽  
Jung Ho Je ◽  
Jeong Y. Lee
Keyword(s):  
Strain Energy ◽  
Unit Volume ◽  
Critical Thickness ◽  
Preferred Orientation ◽  
Rf Power ◽  
X Ray Diffraction ◽  
Working Pressure ◽  
Cross Sectional ◽  
Tin Films ◽  
Tin Thin Films

Recently it was observed through cross-sectional TEM that the preferred orientation of the TiN thin film was changed from (200) to (111) with thickness. In this study, the process of the change in the preferred orientation was studied near the critical thickness by x-ray diffraction, and the value of the critical thickness could be estimated. The change of the critical thickness was also investigated with the strain energy per unit volume. The strain energy could be changed by controlling the energy of the bombarding particle, i.e., by adjusting the rf power, the working pressure, and the substrate bias in sputtering. The critical thickness was decreased monotonically in all cases as the energy of the bombarding particle or the strain energy per unit volume was increased. These results surely show the dependence of the change of the preferred orientation on the strain energy in the TiN thin films.

Multi-Component ZnO-In2O3-SnO2Thin Films Deposited by RF Magnetron Co-Sputtering

2007 ◽  
Vol 124-126 ◽  
pp. 119-122 ◽  
Author(s):  
Chang Sik Son ◽  
Jae Sung Hur ◽  
Byoung Hoon Lee ◽  
Sang Yul Back ◽  
Jeong Seop Lee ◽  
...  
Keyword(s):  
Thin Films ◽  
Room Temperature ◽  
Visible Range ◽  
Rf Power ◽  
Working Pressure ◽  
Average Transmittance ◽  
Sno2 Thin Films ◽  
Ar Gas ◽  
Sputtering System ◽  
High Chemical Stability

Multi-component ZnO-In2O3-SnO2 thin films have been prepared by RF magnetron co-sputtering using targets composed of In4Sn3O12(99.99%) [1] and ZnO(99.99%) at room temperature. In4Sn3O12 contains less In than commercial ITO, so that it lowers cost. Working pressure was held at 3 mtorr flowing Ar gas 20 sccm and sputtering time was 30 min. RF power ratio [RF1 / ( RF1 + RF2 )] of two guns in sputtering system was varied from 0 to 1. Each RF power was varied 0~100W respectively. The thicknesses of the films were 350~650nm. The composition concentrations of the each film were measured with EPMA and AES. The low resistivity of 1-2 × 10-3 and an average transmittance above 80% in the visible range were attained for the films over a range of δ (0.3 ≤ δ ≤ 0.5). The films also showed a high chemical stability with time and a good uniformity.

Microstructure and Optical Properties of Au–Y2O3-stabilized ZrO2 Nanocomposite Films

2005 ◽  
Vol 20 (9) ◽  
pp. 2516-2522 ◽  
Author(s):  
George Sirinakis ◽  
Rezina Siddique ◽  
Christos Monokroussos ◽  
Michael A. Carpenter ◽  
Alain E. Kaloyeros
Keyword(s):  
Optical Properties ◽  
Au Nanoparticles ◽  
Annealing Temperature ◽  
Rutherford Backscattering Spectrometry ◽  
Nanocomposite Films ◽  
Au Nanoparticle ◽  
X Ray Diffraction ◽  
Working Pressure ◽  
Optical Absorption Band ◽  
Size Dependent

Nanocomposite films consisting of gold nanoparticles embedded in an yttria stabilized zirconia (YSZ) matrix were synthesized at room temperature by radio-frequency co-sputtering from YSZ and Au targets at a 5 mTorr working pressure. The films were subsequently annealed for 2 h in 1 atm argon, with the annealing temperature varied from 600 to 1000 °C in steps of 100 °C. The composition, microstructure, and optical properties of the films were characterized as a function of annealing temperature by Rutherford backscattering spectrometry, scanning electron microscopy, Auger electron spectroscopy, x-ray diffraction, and absorption spectroscopy. An optical absorption band due to the surface plasmon resonance (SPR) of the Au nanoparticles was observed around a wavelength of 600 nm. Furthermore, the SPR band full width at half-maximum exhibited an inverse linear dependence on the radius of the Au nanoparticle, with a slope parameter A = 0.18, indicating a weak interaction between the YSZ matrix and the Au nanoparticles. The experimentally observed SPR dependence on nanoparticle size is discussed within the context of the Mie theory and its size-dependent optical constants.

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