Review on the Traditional and Integrated Passives: State-of-the-Art Design and Technologies

With the increased necessity of a high power density and efficient system in aerospace and marine industries, integrated motor drives provide an excellent solution in the modern era. Therefore, a close structural and functional integration of passive components has become a prerequisite task to make a compact overall system. This article reviews the existing motor drives system with integrated passive technologies. To start, the design aspect of the traditional and integrated filter inductors, using the area product approach, is discussed. Subsequently, layouts of traditional and integrated inductors are presented. The available capacitor technologies, suitable for integration, are also discussed with pros and cons of each capacitor type.

Investigations about Al and Cu-Based Planar Spiral Inductors on Sapphire for GaN-Based RF Applications

Conventionally, Cu is preferred over Al to fabricate integrated inductors with higher quality factors on either silicon or sapphire substrates, profiting from its lower resistivity. However, after investigating and comparing these two kinds of metal multilayers in terms of fabrication process, electrical conductivity, in-depth profile analysis and performance of actual inductors, the Al-based metal multilayer exhibits competitive ability in fabricating thin-film inductors on sapphire compared to Cu-based multilayers. This is attributed to the degradation in electrical conductivity out of oxidation of Cu-based metal sublayers or forming alloys between them. Furthermore, in order to avoid complicated de-embedding procedures in the characterization of the on-chip inductors, a six-element equivalent physical model, which takes the parasitic effect of radio-frequency (RF) test structures into account, is proposed and validated by matching well with embedded measurement results.