2006 International Interconnect Technology Conference
Latest Publications

TOTAL DOCUMENTS

70
(FIVE YEARS 0)

H-INDEX

9
(FIVE YEARS 0)

Published By IEEE

1424401046
Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

A New Global Interconnect Paradigm: MIM Power-Ground Plane Capacitors

2006 ◽  
Author(s):  
D.C. Sekar ◽  
E. Demaray ◽  
Hongmei Zhang ◽  
P.A. Kohl ◽  
J.D. Meindl
Keyword(s):  
Ground Plane ◽  
Global Interconnect

Effect of Cu Line Capping Process on Stress Migration Reliability

2006 ◽  
Author(s):  
M.-S. Yhe ◽  
H.I. Chang ◽  
C.H. Shih ◽  
C.J. Lin ◽  
T. Ko ◽  
...  

Reliability Improvement by Adopting Ti-barrier Metal B for Porous Low-k IL Structure

2006 ◽  
Author(s):  
A. Sakata ◽  
M. Yamada ◽  
M. Hasunuma ◽  
S. Takahashi ◽  
A. Yamada ◽  
...  
Keyword(s):  
Reliability Improvement ◽  
Barrier Metal ◽  
Low K

65nm Cu Integration and Interconnect Reliability in Low Stress K=2.75 SiCOH

2006 ◽  
Author(s):  
V. McGahay ◽  
G. Bonilla ◽  
F. Chen ◽  
C. Christiansen ◽  
S. Cohen ◽  
...  
Keyword(s):  
Interconnect Reliability

Misalignment-Free Air-Gap (MFAG) Interconnect with Via Base Structure for 45/65nm Node and Below

2006 ◽  
Author(s):  
J. Noguchi ◽  
T. Oshima ◽  
T. Matsumoto ◽  
S. Uno ◽  
K. Sato ◽  
...  
Keyword(s):  
Air Gap ◽  
Free Air ◽  
Base Structure

Non-destructive electrical characterization of low-k sidewall damage before metallization by a near-field scanned microwave probe

2006 ◽  
Author(s):  
A.R. Schwartz ◽  
V.V. Talanov ◽  
A. Scherz ◽  
B. Kastenmeier ◽  
B. White ◽  
...  
Keyword(s):  
Near Field ◽  
Electrical Characterization ◽  
Microwave Probe ◽  
Non Destructive ◽  
Low K

Advanced Preclean for Integration of PECVD SiOCH (k=2.5) Dielectrics with Copper Metallization Beyond 45nm Technology

2006 ◽  
Author(s):  
X. Fu ◽  
J. Forster ◽  
J. Yu ◽  
P. Gopalraja ◽  
A. Bhatnagar ◽  
...  
Keyword(s):  
Copper Metallization

3D Crystalline Structures of Stress Induced Voiding in Cu Interconnects by Focused Ion Beam and Electron Backscattered Diffraction

2006 ◽  
Author(s):  
Hyo-Jong Lee ◽  
Heung Nam Han ◽  
Suk Hoon Kang ◽  
Jeong-Yun Sun ◽  
Do Hyun Kim ◽  
...  
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Electron Backscattered Diffraction ◽  
Crystalline Structures ◽  
Cu Interconnects
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