2002 Solid-State, Actuators, and Microsystems Workshop Technical Digest
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Closed-Loop Control of a Parallel-Plate Microactuator Beyon the Pull-In Limit

2002 Solid-State, Actuators, and Microsystems Workshop Technical Digest ◽

10.31438/trf.hh2002.64 ◽

2002 ◽

Author(s):

M.S.-C. Lu ◽

G.K. Fedder

Keyword(s):

Parallel Plate ◽

Closed Loop ◽

Closed Loop Control ◽

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RF MEMS based on Epoxy-Core Conductors

2002 Solid-State, Actuators, and Microsystems Workshop Technical Digest ◽

10.31438/trf.hh2002.95 ◽

2002 ◽

Author(s):

Y.-K. Yoon ◽

J.-W. Park ◽

M.G. Allen

Keyword(s):

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New Plastic Microinjection Molding Technique for Extremely Tall Plastic Microstructures using Remote Infrared Radiation Heating Method

2002 Solid-State, Actuators, and Microsystems Workshop Technical Digest ◽

10.31438/trf.hh2002.52 ◽

2002 ◽

Author(s):

S. Kim ◽

R. Trichur ◽

B.H. Kim ◽

G. Beaucage ◽

B.H. Kim ◽

...

Keyword(s):

Infrared Radiation ◽

Radiation Heating ◽

Heating Method ◽

Microinjection Molding

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Low-Voltage High-Speed Ultrasonic Chromatography for Microfluidic Assays

2002 Solid-State, Actuators, and Microsystems Workshop Technical Digest ◽

10.31438/trf.hh2002.25 ◽

2002 ◽

Author(s):

C.-H. Lee ◽

A. Lal

Keyword(s):

Low Voltage ◽

Microfluidic Assays

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Low Voltage MEMS Analog Micromirror Arrays with Hidden Vertical Comb-Drive Actuators

2002 Solid-State, Actuators, and Microsystems Workshop Technical Digest ◽

10.31438/trf.hh2002.3 ◽

2002 ◽

Author(s):

D. Hah ◽

S. Huang ◽

H. Nguyen ◽

H. Chang ◽

J.-C. Tsai ◽

...

Keyword(s):

Low Voltage ◽

Micromirror Arrays

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Liquid Phase Construction of Microstructures

2002 Solid-State, Actuators, and Microsystems Workshop Technical Digest ◽

10.31438/trf.hh2002.38 ◽

2002 ◽

Author(s):

J.M. Bauer ◽

T. Saif ◽

D. Beebe

Keyword(s):

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A 0.8µm CMOS Integrated Surface Micromachined Capacitive Pressure Sensor with EEPROM Trimming and Digital Output for a Tire Pressure Monitoring System

2002 Solid-State, Actuators, and Microsystems Workshop Technical Digest ◽

10.31438/trf.hh2002.46 ◽

2002 ◽

Author(s):

B.P. Gogoi ◽

S. Jo ◽

R. August ◽

A. McNeil ◽

M. Fuhrmann ◽

...

Keyword(s):

Monitoring System ◽

Pressure Sensor ◽

Capacitive Pressure Sensor ◽

Pressure Monitoring ◽

Tire Pressure ◽

Digital Output ◽

Tire Pressure Monitoring System

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Integration of "On-Chip" Electrochemical Detection in a Microfabricated Capillary Electrophoresis Device

2002 Solid-State, Actuators, and Microsystems Workshop Technical Digest ◽

10.31438/trf.hh2002.77 ◽

2002 ◽

Author(s):

T.J. Roussel Jr ◽

M.M. Crain ◽

V. Bathlagundu ◽

D.J. Jackson ◽

J.A. Conklin ◽

...

Keyword(s):

Capillary Electrophoresis ◽

Electrochemical Detection ◽

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Nanoelectromechanical Silicon Carbide Resonators for Ultra High Frequency Applications

2002 Solid-State, Actuators, and Microsystems Workshop Technical Digest ◽

10.31438/trf.hh2002.92 ◽

2002 ◽

Author(s):

X.M.H. Huang ◽

K.L. Ekinci ◽

Y.T. Yang ◽

C.A. Zorman ◽

M. Mehregany ◽

...

Keyword(s):

Silicon Carbide ◽

High Frequency ◽

Ultra High Frequency

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Microcantilevers for Thermal Nanoimaging and Thermomechanical Surface Modification

2002 Solid-State, Actuators, and Microsystems Workshop Technical Digest ◽

10.31438/trf.hh2002.53 ◽

2002 ◽

Author(s):

W.P. King ◽

T.W. Kenny ◽

K.E. Goodson ◽

M. Despont ◽

U. Duerig ◽

...

Keyword(s):

Surface Modification ◽

Thermomechanical Surface

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