Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies
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Published By Springer Netherlands

9781402005251, 9789401003537

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Numerical Simulation of Flow and Chemistry in Thermal Chemical Vapor Deposition Processes

Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies ◽

10.1007/978-94-010-0353-7_6 ◽

2002 ◽

pp. 119-144 ◽

Author(s):

C. R. Kleijn

Keyword(s):

Numerical Simulation ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Thermal Chemical Vapor Deposition ◽

Deposition Processes

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Mass-Transport in an Austenitic Stainless Steel Under High-Flux, Low-Energy Nitrogen Ion Bombardment at Elevated Temperature

Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies ◽

10.1007/978-94-010-0353-7_14 ◽

2002 ◽

pp. 335-360

Author(s):

L. Pranevicius ◽

C. Templier ◽

J.-P. Riviere ◽

S. Muzard ◽

J. Dudonis ◽

...

Keyword(s):

Stainless Steel ◽

Elevated Temperature ◽

Austenitic Stainless Steel ◽

Mass Transport ◽

Ion Bombardment ◽

High Flux ◽

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Feature and Mechanisms of Layer Growth in Liquid Phase Epitaxy of Semiconductor Materials

Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies ◽

10.1007/978-94-010-0353-7_3 ◽

2002 ◽

pp. 43-68

Author(s):

M. Konuma

Keyword(s):

Liquid Phase ◽

Liquid Phase Epitaxy ◽

Layer Growth ◽

Semiconductor Materials

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Self-Assembled Electroactive Ultrathin Films

Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies ◽

10.1007/978-94-010-0353-7_2 ◽

2002 ◽

pp. 19-42

Author(s):

T. P. Cassagneau

Keyword(s):

Ultrathin Films ◽

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Proximal Probe Induced Chemical Processing for Nanodevice Elaboration

Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies ◽

10.1007/978-94-010-0353-7_11 ◽

2002 ◽

pp. 255-281 ◽

Author(s):

D. Tonneau ◽

N. Clement ◽

A. Houel ◽

N. Bonnail ◽

H. Dallaporta ◽

...

Keyword(s):

Chemical Processing

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Electroplating and Electroless Deposition Processes for Electronic Components and Microsystems

Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies ◽

10.1007/978-94-010-0353-7_1 ◽

2002 ◽

pp. 1-17

Author(s):

T. E. G. Daenen ◽

D. L. Kubber

Keyword(s):

Electroless Deposition ◽

Electronic Components ◽

Deposition Processes

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Thin Film Deposition By Sol-Gel and CVD Processing of Metal-Organic Precursors

Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies ◽

10.1007/978-94-010-0353-7_5 ◽

2002 ◽

pp. 91-118 ◽

Author(s):

S. Mathur

Keyword(s):

Thin Film ◽

Sol Gel ◽

Thin Film Deposition ◽

Film Deposition ◽

Metal Organic ◽

Organic Precursors

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Deposition of Thin Films by Sputtering

Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies ◽

10.1007/978-94-010-0353-7_13 ◽

2002 ◽

pp. 309-333 ◽

Author(s):

W. Gulbiński

Keyword(s):

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Sol-Gel Deposition Processes of Thin Ceramic Films

Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies ◽

10.1007/978-94-010-0353-7_4 ◽

2002 ◽

pp. 69-89 ◽

Author(s):

D. Sporn ◽

P. Löbmann ◽

U. Guntow ◽

W. Glaubitt

Keyword(s):

Sol Gel ◽

Ceramic Films ◽

Deposition Processes

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Photochemical Vapour Deposition of Thin Films

Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies ◽

10.1007/978-94-010-0353-7_9 ◽

2002 ◽

pp. 199-222

Author(s):

S. J. C. Irvine

Keyword(s):

Vapour Deposition

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