ChemInform Abstract: Chemical Vapor Deposition of Ru Thin Films with an Enhanced Morphology, Thermal Stability, and Electrical Properties Using a RuO4Precursor.

ChemInform ◽  
2009 ◽  
Vol 40 (17) ◽  
Author(s):  
Jeong Hwan Han ◽  
Sang Woon Lee ◽  
Gyu-Jin Choi ◽  
Sang Young Lee ◽  
Cheol Seong Hwang ◽  
...  
Keyword(s):  
Thin Films ◽  
Thermal Stability ◽  
Chemical Vapor Deposition ◽  
Electrical Properties ◽  
Vapor Deposition ◽  
Chemical Vapor

Chemical Vapor Deposition of Ru Thin Films with an Enhanced Morphology, Thermal Stability, and Electrical Properties Using a RuO4Precursor

2009 ◽  
Vol 21 (2) ◽  
pp. 207-209 ◽  
Author(s):  
Jeong Hwan Han ◽  
Sang Woon Lee ◽  
Gyu-Jin Choi ◽  
Sang Young Lee ◽  
Cheol Seong Hwang ◽  
...  
Keyword(s):  
Thin Films ◽  
Thermal Stability ◽  
Chemical Vapor Deposition ◽  
Electrical Properties ◽  
Vapor Deposition ◽  
Chemical Vapor

Structural, morphological, optical and electrical properties of Sb-doped SnO2 thin films obtained by aerosol assisted chemical vapor deposition

2017 ◽  
Vol 638 ◽  
pp. 22-27 ◽  
Author(s):  
A. Heiras-Trevizo ◽  
P. Amézaga-Madrid ◽  
L. Corral-Bustamante ◽  
W. Antúnez-Flores ◽  
P. Pizá Ruiz ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Electrical Properties ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Optical And Electrical Properties ◽  
Sno2 Thin Films
Sign in / Sign up

Export Citation Format

Share Document