Structural, morphological, optical and electrical properties of Sb-doped SnO2 thin films obtained by aerosol assisted chemical vapor deposition

Thin Solid Films ◽

10.1016/j.tsf.2017.07.017 ◽

2017 ◽

Vol 638 ◽

pp. 22-27 ◽

Author(s):

A. Heiras-Trevizo ◽

P. Amézaga-Madrid ◽

L. Corral-Bustamante ◽

W. Antúnez-Flores ◽

P. Pizá Ruiz ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Electrical Properties ◽

Vapor Deposition ◽

Chemical Vapor ◽

Optical And Electrical Properties ◽

Sno2 Thin Films

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Optical and electrical properties of p-type transparent conducting Cu–Al–O thin films prepared by plasma enhanced chemical vapor deposition

Materials Science and Engineering B ◽

10.1016/s0921-5107(01)00545-1 ◽

2001 ◽

Vol 85 (2-3) ◽

pp. 131-134 ◽

Author(s):

Yue Wang ◽

Hao Gong ◽

Furong Zhu ◽

Ling Liu ◽

Lei Huang ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Electrical Properties ◽

Vapor Deposition ◽

Chemical Vapor ◽

Optical And Electrical Properties ◽

Transparent Conducting ◽

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Influence of silane flow on structural, optical and electrical properties of a-Si:H thin films deposited by hot wire chemical vapor deposition (HW-CVD) technique

Solar Energy Materials and Solar Cells ◽

10.1016/s0927-0248(01)00051-4 ◽

2002 ◽

Vol 71 (2) ◽

pp. 153-167 ◽

Author(s):

S.R. Jadkar ◽

Jaydeep V. Sali ◽

D.V. Musale ◽

S.T. Kshirsagar ◽

M.G. Takwale

Keyword(s):

Chemical Vapor Deposition ◽

Electrical Properties ◽

Vapor Deposition ◽

Chemical Vapor ◽

Optical And Electrical Properties ◽

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The influence of oxygen flow rate on properties of SnO2 thin films grown epitaxially on c-sapphire by chemical vapor deposition

Thin Solid Films ◽

10.1016/j.tsf.2015.04.010 ◽

2015 ◽

Vol 594 ◽

pp. 270-276 ◽

Author(s):

Y.M. Lu ◽

J. Jiang ◽

C. Xia ◽

B. Kramm ◽

A. Polity ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Flow Rate ◽

Vapor Deposition ◽

Chemical Vapor ◽

Oxygen Flow Rate ◽

Oxygen Flow ◽

Sno2 Thin Films

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Synthesis and Electrical Properties of (Bi1/2Na1/2)TiO3(BNT) Ferroelectric Thin Films by Liquid Sprayed Mist Chemical Vapor Deposition Technique

Journal of Nanoscience and Nanotechnology ◽

10.1166/jnn.2006.038 ◽

2006 ◽

Vol 6 (11) ◽

pp. 3479-3482

Author(s):

Bok-Hee Kim ◽

Sang-Hee Kim ◽

Jong-Hwan Kim ◽

Kun-Jae Lee ◽

Yong-Ho Choa ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Electrical Properties ◽

Vapor Deposition ◽

Chemical Vapor ◽

Ferroelectric Thin Films ◽

Deposition Technique ◽

Chemical Vapor Deposition Technique ◽

Vapor Deposition Technique

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Structural， optical and electrical properties of Ga2（1-x）In2xO3 films prepared by metalorganic chemical vapor deposition

Acta Physica Sinica ◽

10.7498/aps.58.7079 ◽

2009 ◽

Vol 58 (10) ◽

pp. 7079

Author(s):

Yang Fan ◽

Ma Jin ◽

Kong Ling-Yi ◽

Luan Cai-Na ◽

Zhu Zhen

Keyword(s):

Chemical Vapor Deposition ◽

Electrical Properties ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Optical And Electrical Properties ◽

Metalorganic Chemical

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Effects of SrF2 phase on electrical properties of SrTiO3 thin films deposited by plasma-enhanced metalorganic chemical vapor deposition

Integrated Ferroelectrics ◽

10.1080/10584589708019982 ◽

1997 ◽

Vol 14 (1-4) ◽

pp. 105-113 ◽

Author(s):

Nam-Kyeong Kim ◽

Soon-Gil Yoon ◽

Won-Jae Lee ◽

Ho-Gi Kim

Keyword(s):

Chemical Vapor Deposition ◽

Electrical Properties ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Metalorganic Chemical

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ChemInform Abstract: Chemical Vapor Deposition of Ru Thin Films with an Enhanced Morphology, Thermal Stability, and Electrical Properties Using a RuO4Precursor.

10.1002/chin.200917216 ◽

2009 ◽

Vol 40 (17) ◽

Author(s):

Jeong Hwan Han ◽

Sang Woon Lee ◽

Gyu-Jin Choi ◽

Sang Young Lee ◽

Cheol Seong Hwang ◽

...

Keyword(s):

Thermal Stability ◽

Chemical Vapor Deposition ◽

Electrical Properties ◽

Vapor Deposition ◽

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Preparation of Bi2WO6 thin films by metalorganic chemical vapor deposition and their electrical properties

Thin Solid Films ◽

10.1016/s0040-6090(01)01005-7 ◽

2001 ◽

Vol 392 (1) ◽

pp. 128-133 ◽

Author(s):

Katsuyuki Ishikawa ◽

Takayuki Watanabe ◽

Hiroshi Funakubo

Keyword(s):

Chemical Vapor Deposition ◽

Electrical Properties ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Metalorganic Chemical

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Composition, structural, and electrical properties of fluorinated silicon–nitride thin films grown by remote plasma-enhanced chemical-vapor deposition from SiF[sub 4]/NH[sub 3] mixtures

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.1699335 ◽

2004 ◽

Vol 22 (3) ◽

pp. 570 ◽

Author(s):

J. Fandiño ◽

A. Ortiz ◽

L. Rodrı́guez-Fernandez ◽

J. C. Alonso

Keyword(s):

Chemical Vapor Deposition ◽

Silicon Nitride ◽

Electrical Properties ◽

Vapor Deposition ◽

Chemical Vapor ◽

Remote Plasma ◽

Structural And Electrical Properties

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Plasma Surface Modification and Gas Sensing Properties of SnO2 Thin Films Prepared by Plasma Enhanced Chemical Vapor Deposition

IEEE Sensors, 2005. ◽

10.1109/icsens.2005.1597916 ◽

2006 ◽

Author(s):

O.K. Tan ◽

H. Huang ◽

Y.C. Lee ◽

M.S. Tse ◽

J. Guo ◽

...

Keyword(s):

Surface Modification ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Gas Sensing ◽

Chemical Vapor ◽

Plasma Surface ◽

Sensing Properties ◽

Gas Sensing Properties ◽

Sno2 Thin Films

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