Characterization of Chemical Vapor Deposited Copper Films on Mercaptan Self-Assembled Monolayer Diffusion Barriers
2006 ◽
Vol 12
(11)
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pp. 679-684
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Keyword(s):
Keyword(s):
Keyword(s):
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1999 ◽
Vol 425
(2-3)
◽
pp. 245-258
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2001 ◽
Vol 370
(1)
◽
pp. 277-283
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1999 ◽
Vol 77
(5-6)
◽
pp. 1077-1084
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2006 ◽
Vol 89
(11)
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pp. 3560-3563
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