scholarly journals Controlling hydrocarbon transport and electron beam induced deposition on single layer graphene: Toward atomic scale synthesis in the scanning transmission electron microscope

Nano Select ◽  
2021 ◽  
Author(s):  
Ondrej Dyck ◽  
Andrew R. Lupini ◽  
Philip D. Rack ◽  
Jason Fowlkes ◽  
Stephen Jesse
Author(s):  
M.E. Mochel ◽  
C. J. Humphreys ◽  
J. M. Mochel ◽  
J. A. Eades

Holes 20 Å in diameter and fine lines 20 Å wide can be cut in the metal-β-aluminas using the 10 Å electron beam of the Vacuum Generators, HB5 scanning transmission electron microscope. The minimum current density required for cutting was 103 amp/cm2. Electron energies of 40,60,80,100 keV were used.This technique has higher resolution than current lithography methods and is direct, requiring no chemical development. The width of isolated lines made on solid substrates is currently about .1μm (Ahmed and McMahon, 1981) and .03μm (Jackel et al., 1980). M. Isaacson and A. Murry have carried out electron beam writing on NaCl crystals supported on a carbon film on the scale we report here.In our case uniform 20Å holes and lines can be cut through self-supporting 1000A thick slabs of sodium-β-alumina to provide very high electron contrast. Once cut, the β-aluminas are stable and will tolerate exposure to air without degradation of the electron cut patterns. They may be used directly as masks (eg. for ion implantation). We believe they could be cut on the substrate with no damage to the underlying material.


2021 ◽  
Vol 51 (1) ◽  
Author(s):  
Gwangyeob Lee ◽  
Seung-Hyub Baek ◽  
Hye Jung Chang

AbstractWe demonstrate a fabrication of an atomically controlled single-crystal heart-shaped nanostructure using a convergent electron beam in a scanning transmission electron microscope. The delicately controlled e-beam enable epitaxial crystallization of perovskite oxide LaAlO3 grown out of the relative conductive interface (i.e. 2 dimensional electron gas) between amorphous LaAlO3/crystalline SrTiO3.


2004 ◽  
Vol 10 (S02) ◽  
pp. 330-331
Author(s):  
Maria Varela ◽  
Vanessa Peña ◽  
Zouhair Sefrioui ◽  
Andrew R. Lupini ◽  
Jacobo Santamaria ◽  
...  

Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.


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