Gas barrier and mechanical properties of a single‐layer silicon oxide film prepared by roll‐to‐roll PECVD system
2019 ◽
Vol 16
(4)
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pp. 1800170
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Keyword(s):
2002 ◽
Vol 20
(3)
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pp. 828
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Keyword(s):
2002 ◽
Vol 41
(Part 2, No. 7A)
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pp. L787-L789
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Keyword(s):
1993 ◽
Vol 64-65
◽
pp. 849-856
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Keyword(s):
1995 ◽
Vol 7
(14)
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pp. 2901-2907
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2001 ◽
Vol 48
(8)
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pp. 1550-1555
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2018 ◽
Vol 54
(12)
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pp. 109
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Keyword(s):
2017 ◽
Vol 184
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pp. 262-267
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