Effect of a rapid thermal annealing process on the electrical properties of an aluminum-doped indium zinc tin oxide thin film transistor

2016 ◽  
Vol 214 (1) ◽  
pp. 1600490 ◽  
Author(s):  
Yunyong Nam ◽  
Jong-Heon Yang ◽  
Pilseong Jeong ◽  
Oh-Sang Kwon ◽  
Jae-Eun Pi ◽  
...  
Keyword(s):  
Thin Film ◽  
Electrical Properties ◽  
Rapid Thermal Annealing ◽  
Tin Oxide ◽  
Thin Film Transistor ◽  
Annealing Process ◽  
Oxide Thin Film ◽  
Rapid Thermal Annealing Process ◽  
Zinc Tin Oxide ◽  
Thermal Annealing Process

Scanning Rapid Thermal Annealing Process for Poly Silicon Thin Film Transistor

2000 ◽  
Vol 39 (Part 1, No. 10) ◽  
pp. 5773-5775 ◽  
Author(s):  
Tae-Kyung Kim ◽  
Gi-Bum Kim ◽  
Yeo-Geon Yoon ◽  
Chang-Hoon Kim ◽  
Byung-Il Lee ◽  
...  
Keyword(s):  
Thin Film ◽  
Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
Thin Film Transistor ◽  
Annealing Process ◽  
Rapid Thermal Annealing Process ◽  
Silicon Thin Film ◽  
Poly Silicon ◽  
Thermal Annealing Process

Effects of annealing process on characteristics of fully transparent zinc tin oxide thin-film transistor

2014 ◽  
Vol 23 (2) ◽  
pp. 026101 ◽  
Author(s):  
Yong-Yue Chen ◽  
Xiong Wang ◽  
Xi-Kun Cai ◽  
Zi-Jian Yuan ◽  
Xia-Ming Zhu ◽  
...  
Keyword(s):  
Thin Film ◽  
Tin Oxide ◽  
Thin Film Transistor ◽  
Annealing Process ◽  
Oxide Thin Film ◽  
Zinc Tin Oxide
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