Scanning Rapid Thermal Annealing Process for Poly Silicon Thin Film Transistor

Japanese Journal of Applied Physics ◽

10.1143/jjap.39.5773 ◽

2000 ◽

Vol 39 (Part 1, No. 10) ◽

pp. 5773-5775 ◽

Author(s):

Tae-Kyung Kim ◽

Gi-Bum Kim ◽

Yeo-Geon Yoon ◽

Chang-Hoon Kim ◽

Byung-Il Lee ◽

...

Keyword(s):

Thin Film ◽

Thermal Annealing ◽

Rapid Thermal Annealing ◽

Thin Film Transistor ◽

Annealing Process ◽

Rapid Thermal Annealing Process ◽

Silicon Thin Film ◽

Poly Silicon ◽

Thermal Annealing Process

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Development of a rapid thermal annealing process for polycrystalline silicon thin-film solar cells on glass

Materials Science and Engineering B ◽

10.1016/j.mseb.2008.05.007 ◽

2009 ◽

Vol 159-160 ◽

pp. 329-332 ◽

Author(s):

B. Rau ◽

T. Weber ◽

B. Gorka ◽

P. Dogan ◽

F. Fenske ◽

...

Keyword(s):

Thin Film ◽

Solar Cells ◽

Thermal Annealing ◽

Rapid Thermal Annealing ◽

Polycrystalline Silicon ◽

Annealing Process ◽

Thin Film Solar Cells ◽

Rapid Thermal Annealing Process ◽

Silicon Thin Film ◽

Thermal Annealing Process

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Fabrication of a high-performance poly-Si thin-film transistor using a poly-Si film prepared by silicide-enhanced rapid thermal annealing process

Electronic Materials Letters ◽

10.1007/s13391-014-4095-5 ◽

2014 ◽

Vol 10 (6) ◽

pp. 1081-1085

Author(s):

Yong Ho Yang ◽

Kyung Min Ahn ◽

Seung Mo Kang ◽

Sun Hong Moon ◽

Byung Tae Ahn

Keyword(s):

Thin Film ◽

Thermal Annealing ◽

Rapid Thermal Annealing ◽

High Performance ◽

Thin Film Transistor ◽

Annealing Process ◽

Rapid Thermal Annealing Process ◽

Thermal Annealing Process ◽

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Effect of a rapid thermal annealing process on the electrical properties of an aluminum-doped indium zinc tin oxide thin film transistor

physica status solidi (a) ◽

10.1002/pssa.201600490 ◽

2016 ◽

Vol 214 (1) ◽

pp. 1600490 ◽

Author(s):

Yunyong Nam ◽

Jong-Heon Yang ◽

Pilseong Jeong ◽

Oh-Sang Kwon ◽

Jae-Eun Pi ◽

...

Keyword(s):

Thin Film ◽

Electrical Properties ◽

Rapid Thermal Annealing ◽

Tin Oxide ◽

Thin Film Transistor ◽

Annealing Process ◽

Oxide Thin Film ◽

Rapid Thermal Annealing Process ◽

Zinc Tin Oxide ◽

Thermal Annealing Process

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Gold nanoparticles created by rapid thermal annealing process applied to thin film solar cell

The European Physical Journal Applied Physics ◽

10.1051/epjap/2016160119 ◽

2016 ◽

Vol 76 (1) ◽

pp. 10301

Author(s):

Thanh Tung Bui ◽

Mau Chien Dang

Keyword(s):

Thin Film ◽

Gold Nanoparticles ◽

Thermal Annealing ◽

Rapid Thermal Annealing ◽

Thin Film Solar Cell ◽

Annealing Process ◽

Rapid Thermal Annealing Process ◽

Thermal Annealing Process

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Fabrication of sol–gel derived ZrO2 thin film for HR coatings via rapid thermal annealing process

Journal of Sol-Gel Science and Technology ◽

10.1007/s10971-013-3086-6 ◽

2013 ◽

Vol 67 (2) ◽

pp. 339-343 ◽

Author(s):

Shengzhao Wang ◽

Jun Shen

Keyword(s):

Thin Film ◽

Thermal Annealing ◽

Rapid Thermal Annealing ◽

Sol Gel ◽

Annealing Process ◽

Rapid Thermal Annealing Process ◽

Zro2 Thin Film ◽

Thermal Annealing Process ◽

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Effects of the Introduction of UV Irradiation and Rapid Thermal Annealing Process to Sol-Gel Method Derived Ferroelectric Sr0.9Bi2.1Ta1.8Nb0.2O9Thin Films on Crystallization and Dielectric/Electrical Properties

Journal of the Korean Institute of Electrical and Electronic Material Engineers ◽

10.4313/jkem.2004.17.1.007 ◽

2004 ◽

Vol 17 (1) ◽

pp. 7-15

Keyword(s):

Electrical Properties ◽

Thermal Annealing ◽

Rapid Thermal Annealing ◽

Uv Irradiation ◽

Sol Gel ◽

Annealing Process ◽

Rapid Thermal Annealing Process ◽

Sol Gel Method ◽

Thermal Annealing Process

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Analysis of the eight parameter variation of the resonant tunneling diode (RTD) in the rapid thermal annealing process with resistance compensation effect

AIP Advances ◽

10.1063/1.5133899 ◽

2020 ◽

Vol 10 (3) ◽

pp. 035103

Author(s):

Fan Zhao ◽

Yidian Wang ◽

Weilian Guo ◽

Jia Cong ◽

Clarence Augustine T. H. Tee ◽

...

Keyword(s):

Thermal Annealing ◽

Rapid Thermal Annealing ◽

Resonant Tunneling ◽

Compensation Effect ◽

Parameter Variation ◽

Resonant Tunneling Diode ◽

Annealing Process ◽

Rapid Thermal Annealing Process ◽

Tunneling Diode ◽

Thermal Annealing Process

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Fabrication of Polycrystalline Si Films by Vapor-Induced Crystallization and Rapid Thermal Annealing Process

Electrochemical and Solid-State Letters ◽

10.1149/1.3432320 ◽

2010 ◽

Vol 13 (8) ◽

pp. J92 ◽

Author(s):

Yong-Ho Yang ◽

Kyung-Min Ahn ◽

Byung-Tae Ahn

Keyword(s):

Thermal Annealing ◽

Rapid Thermal Annealing ◽

Annealing Process ◽

Rapid Thermal Annealing Process ◽

Thermal Annealing Process ◽

Si Films ◽

Induced Crystallization

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Structural and photoluminescence characteristics of ZnO films by room temperature sputtering and rapid thermal annealing process

Applied Physics A ◽

10.1007/s00339-006-3620-2 ◽

2006 ◽

Vol 84 (3) ◽

pp. 345-349 ◽

Author(s):

P.-T. Hsieh ◽

Y.-C. Chen ◽

C.-M. Wang ◽

Y.-Z. Tsai ◽

C.-C. Hu

Keyword(s):

Thermal Annealing ◽

Rapid Thermal Annealing ◽

Room Temperature ◽

Annealing Process ◽

Zno Films ◽

Rapid Thermal Annealing Process ◽

Thermal Annealing Process

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Characteristics-improvement of QD semiconductor optical amplifier using rapid-thermal annealing process

Optical Components and Materials XV ◽

10.1117/12.2288608 ◽

2018 ◽

Author(s):

Duangrudee Worasucheep ◽

Atsushi Matsumoto ◽

Kouichi Akahane ◽

Naokatsu Yamamoto ◽

Naoya Wada ◽

...

Keyword(s):

Thermal Annealing ◽

Rapid Thermal Annealing ◽

Semiconductor Optical Amplifier ◽

Optical Amplifier ◽

Annealing Process ◽

Rapid Thermal Annealing Process ◽

Thermal Annealing Process

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