scholarly journals Optimizing the Stoichiometry of Ga 2 O 3 Grown by RF‐Magnetron Sputter Deposition by Correlating Optical Properties and Growth Parameters

2019 ◽  
Vol 216 (20) ◽  
pp. 1900385 ◽  
Author(s):  
Philipp Schurig ◽  
Marcel Couturier ◽  
Martin Becker ◽  
Angelika Polity ◽  
Peter Jens Klar
Keyword(s):  
Optical Properties ◽  
Growth Parameters ◽  
Sputter Deposition ◽  
Magnetron Sputter Deposition ◽  
Rf Magnetron Sputter ◽  
Magnetron Sputter

Fabrication of p-Type ZnO Thin Films Using rf-Magnetron Sputter Deposition

2009 ◽  
Vol 12 (4) ◽  
pp. H109 ◽  
Author(s):  
Jun Kwan Kim ◽  
Jung Wook Lim ◽  
Hyun Tak Kim ◽  
Sang Hoon Kim ◽  
Sun Jin Yun
Keyword(s):  
Thin Films ◽  
Sputter Deposition ◽  
Zno Thin Films ◽  
Magnetron Sputter Deposition ◽  
Rf Magnetron Sputter ◽  
Magnetron Sputter ◽  
P Type
Sign in / Sign up

Export Citation Format

Share Document