Dc and rf magnetron sputter deposition of NbN films with simultaneous control of the nitrogen consumption
2008 ◽
Vol 52
(4)
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pp. 1070-1076
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2009 ◽
Vol 48
(4)
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pp. 04C139
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2009 ◽
Vol 12
(4)
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pp. H109
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Keyword(s):
2019 ◽
Vol 216
(20)
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pp. 1900385
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2010 ◽
Vol 49
(4)
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pp. 04DP09
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2000 ◽
Vol 192-195
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pp. 255-258
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