High-Performance Transparent Conducting Ga-Doped ZnO Films Deposited by RF Magnetron Sputter Deposition

2010 ◽  
Vol 49 (4) ◽  
pp. 04DP09 ◽  
Author(s):  
Jun Kwan Kim ◽  
Jae Min Lee ◽  
Jung Wook Lim ◽  
Je Ha Kim ◽  
Sun Jin Yun
Keyword(s):  
High Performance ◽  
Sputter Deposition ◽  
Zno Films ◽  
Transparent Conducting ◽  
Magnetron Sputter Deposition ◽  
Doped Zno ◽  
Rf Magnetron Sputter ◽  
Magnetron Sputter

rf magnetron sputter deposition of transparent conducting Nb-doped TiO2 films on SrTiO3

2007 ◽  
Vol 101 (3) ◽  
pp. 033125 ◽  
Author(s):  
Meagen A. Gillispie ◽  
Maikel F. A. M. van Hest ◽  
Matthew S. Dabney ◽  
John D. Perkins ◽  
David S. Ginley
Keyword(s):  
Sputter Deposition ◽  
Tio2 Films ◽  
Doped Tio2 ◽  
Transparent Conducting ◽  
Magnetron Sputter Deposition ◽  
Rf Magnetron Sputter ◽  
Magnetron Sputter

Structure of uniform and high-quality Al-doped ZnO films by magnetron sputter deposition at low temperatures

2018 ◽  
Vol 665 ◽  
pp. 109-116 ◽  
Author(s):  
Fanping Meng ◽  
Shou Peng ◽  
Genbao Xu ◽  
Yun Wang ◽  
Fangfang Ge ◽  
...  
Keyword(s):  
Low Temperatures ◽  
Sputter Deposition ◽  
Zno Films ◽  
High Quality ◽  
Magnetron Sputter Deposition ◽  
Doped Zno ◽  
Magnetron Sputter

Fabrication of p-Type ZnO Thin Films Using rf-Magnetron Sputter Deposition

2009 ◽  
Vol 12 (4) ◽  
pp. H109 ◽  
Author(s):  
Jun Kwan Kim ◽  
Jung Wook Lim ◽  
Hyun Tak Kim ◽  
Sang Hoon Kim ◽  
Sun Jin Yun
Keyword(s):  
Thin Films ◽  
Sputter Deposition ◽  
Zno Thin Films ◽  
Magnetron Sputter Deposition ◽  
Rf Magnetron Sputter ◽  
Magnetron Sputter ◽  
P Type
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