dc and rf magnetron sputter deposition of NbN films with simultaneous control of the nitrogen consumption

1988 ◽  
Vol 63 (6) ◽  
pp. 2086-2090 ◽  
Author(s):  
H.‐J. Hedbabny ◽  
H. Rogalla
Keyword(s):  
Sputter Deposition ◽  
Nitrogen Consumption ◽  
Simultaneous Control ◽  
Magnetron Sputter Deposition ◽  
Rf Magnetron Sputter ◽  
Magnetron Sputter

Fabrication of p-Type ZnO Thin Films Using rf-Magnetron Sputter Deposition

2009 ◽  
Vol 12 (4) ◽  
pp. H109 ◽  
Author(s):  
Jun Kwan Kim ◽  
Jung Wook Lim ◽  
Hyun Tak Kim ◽  
Sang Hoon Kim ◽  
Sun Jin Yun
Keyword(s):  
Thin Films ◽  
Sputter Deposition ◽  
Zno Thin Films ◽  
Magnetron Sputter Deposition ◽  
Rf Magnetron Sputter ◽  
Magnetron Sputter ◽  
P Type

rf magnetron sputter deposition of transparent conducting Nb-doped TiO2 films on SrTiO3

2007 ◽  
Vol 101 (3) ◽  
pp. 033125 ◽  
Author(s):  
Meagen A. Gillispie ◽  
Maikel F. A. M. van Hest ◽  
Matthew S. Dabney ◽  
John D. Perkins ◽  
David S. Ginley
Keyword(s):  
Sputter Deposition ◽  
Tio2 Films ◽  
Doped Tio2 ◽  
Transparent Conducting ◽  
Magnetron Sputter Deposition ◽  
Rf Magnetron Sputter ◽  
Magnetron Sputter
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