Epitaxial Growth and Solar‐Blind Photoelectric Characteristic of Ga 2 O 3 Film on Various Oriented Sapphire Substrates by Plasma‐Enhanced Chemical Vapor Deposition

2021 ◽  
pp. 2100076
Author(s):  
Haizheng Hu ◽  
Chao Wu ◽  
Nie Zhao ◽  
Zhiyan Zhu ◽  
Peigang Li ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Epitaxial Growth ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Photoelectric Characteristic ◽  
Sapphire Substrates ◽  
Solar Blind

Selective epitaxial growth of Ge 1−x Sn x on Si by using metal-organic chemical vapor deposition

2017 ◽  
Vol 468 ◽  
pp. 614-619 ◽  
Author(s):  
Tomoya Washizu ◽  
Shinichi Ike ◽  
Yuki Inuzuka ◽  
Wakana Takeuchi ◽  
Osamu Nakatsuka ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Epitaxial Growth ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Selective Epitaxial Growth ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition
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