A theoretical estimate of the voltage dependence of the pattern resolution in electron-beam lithography
Keyword(s):
2014 ◽
Vol 121
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pp. 142-146
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Keyword(s):
2020 ◽
Vol 25
(3)
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pp. 1-7
1979 ◽
Vol 16
(6)
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pp. 1759-1763
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1983 ◽
Vol 41
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pp. 96-99
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1982 ◽
Vol 21
(4)
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pp. 999-1004
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Keyword(s):
1998 ◽
Vol 16
(6)
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pp. 3158
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